Study of chemical bonds and element composition of silicon oxycarbonitride films by the methods of XP-, IR-, and energy-dispersive spectroscopy › Research Explorer

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Study of chemical bonds and element composition of silicon oxycarbonitride films by the methods of XP-, IR-, and energy-dispersive spectroscopy

Research output: Contribution to journal › Article › peer-review

Carbon Nanomaterials Laboratory

DOI

https://doi.org/10.1134/S1087659617050042
Final published version

N. I. Fainer
A. G. Plekhanov
I. P. Asanov

Original language	English
Pages (from-to)	410-416
Number of pages	7
Journal	Glass Physics and Chemistry
Volume	43
Issue number	5
DOIs	https://doi.org/10.1134/S1087659617050042
Publication status	Published - 1 Sept 2017

Research areas

1,1,3,3-tetramethyldisilazane, EDS, hydrogenated silicon oxycarbonitride, plasma-chemical synthesis, XPS

OECD FOS+WOS

ID: 9891667