Structure of diamond films grown using high-speed flow of a thermally activated CH4-H2 gas mixture

Standard

Structure of diamond films grown using high-speed flow of a thermally activated CH₄-H₂ gas mixture. / Fedoseeva, Yu V.; Gorodetskiy, D. V.; Baskakova, K. I. et al.

In: Materials, Vol. 13, No. 1, 219, 04.01.2020.

Research output: Contribution to journal › Article › peer-review

Harvard

Fedoseeva, YV, Gorodetskiy, DV, Baskakova, KI, Asanov, IP, Bulusheva, LG, Makarova, AA, Yudin, IB, Plotnikov, MY, Emelyanov, AA, Rebrov, AK & Okotrub, AV 2020, 'Structure of diamond films grown using high-speed flow of a thermally activated CH₄-H₂ gas mixture', Materials, vol. 13, no. 1, 219. https://doi.org/10.3390/ma13010219

APA

Fedoseeva, Y. V., Gorodetskiy, D. V., Baskakova, K. I., Asanov, I. P., Bulusheva, L. G., Makarova, A. A., Yudin, I. B., Plotnikov, M. Y., Emelyanov, A. A., Rebrov, A. K., & Okotrub, A. V. (2020). Structure of diamond films grown using high-speed flow of a thermally activated CH₄-H₂ gas mixture. Materials, 13(1), [219]. https://doi.org/10.3390/ma13010219

Vancouver

Fedoseeva YV, Gorodetskiy DV, Baskakova KI, Asanov IP, Bulusheva LG, Makarova AA et al. Structure of diamond films grown using high-speed flow of a thermally activated CH₄-H₂ gas mixture. Materials. 2020 Jan 4;13(1):219. doi: 10.3390/ma13010219

Author

Fedoseeva, Yu V. ; Gorodetskiy, D. V. ; Baskakova, K. I. et al. / Structure of diamond films grown using high-speed flow of a thermally activated CH₄-H₂ gas mixture. In: Materials. 2020 ; Vol. 13, No. 1.

BibTeX

@article{2aeb1e84a30c47d3bcb9f06a6142862f,

title = "Structure of diamond films grown using high-speed flow of a thermally activated CH4-H2 gas mixture",

abstract = "Diamond films are advanced engineering materials for various industrial applications requiring a coating material with extremely high thermal conductivity and low electrical conductivity. An approach for the synthesis of diamond films via high-speed jet deposition of thermally activated gas has been applied. In this method, spatially separated high-speed flows of methane and hydrogen were thermally activated, and methyl and hydrogen radicals were deposited on heated molybdenum substrates. The morphology and structure of three diamond films were studied, which were synthesized at a heating power of 900, 1700, or 1800 W, methane flow rate of 10 or 30 sccm, hydrogen flow rate of 1500 or 3500 sccm, and duration of the synthesis from 1.5 to 3 h.The morphology and electronic state of the carbon on the surface and in the bulk of the obtained films were analyzed by scanning electron microscopy, Raman scattering, X-ray photoelectron, and near-edge X-ray absorption fine structure spectroscopies. The diamond micro-crystals with a thick oxidized amorphous sp2-carbon coating were grown at a heating power of 900 W and a hydrogen flow rate of 1500 sccm. The quality of the crystals was improved, and the growth rate of the diamond film was increased seven times when the heating power was 1700-1800Wand the methane and hydrogen flow rates were 30 and 3500 sccm, respectively. Defective octahedral diamond crystals of 30 μm in size with a thin sp2-carbon surface layer were synthesized on a Mo substrate heated at 1273 K for 1.5 h. When the synthesis duration was doubled, and the substrate temperature was decreased to 1073 K, the denser film with rhombic-dodecahedron diamond crystals was grown. In this case, the thinnest hydrogenated sp2-carbon coating was detected on the surface of the diamond crystals.",

keywords = "Diamond film, High-speed gas flow, Jet-deposition, NEXAFS, Surface coating, XPS, diamond film, THIN-FILMS, jet-deposition, DEPOSITION, PHOTOELECTRON, X-RAY-ABSORPTION, MECHANICAL-PROPERTIES, CVD, HYDROGEN, surface coating, RAMAN-SPECTRUM, SPECTROSCOPY, high-speed gas flow, ELECTRONIC-STRUCTURE",

author = "Fedoseeva, {Yu V.} and Gorodetskiy, {D. V.} and Baskakova, {K. I.} and Asanov, {I. P.} and Bulusheva, {L. G.} and Makarova, {A. A.} and Yudin, {I. B.} and Plotnikov, {M. Yu} and Emelyanov, {A. A.} and Rebrov, {A. K.} and Okotrub, {A. V.}",

year = "2020",

month = jan,

day = "4",

doi = "10.3390/ma13010219",

language = "English",

volume = "13",

journal = "Materials",

issn = "1996-1944",

publisher = "MDPI AG",

number = "1",

}

RIS

TY - JOUR

T1 - Structure of diamond films grown using high-speed flow of a thermally activated CH4-H2 gas mixture

AU - Fedoseeva, Yu V.

AU - Gorodetskiy, D. V.

AU - Baskakova, K. I.

AU - Asanov, I. P.

AU - Bulusheva, L. G.

AU - Makarova, A. A.

AU - Yudin, I. B.

AU - Plotnikov, M. Yu

AU - Emelyanov, A. A.

AU - Rebrov, A. K.

AU - Okotrub, A. V.

PY - 2020/1/4

Y1 - 2020/1/4

N2 - Diamond films are advanced engineering materials for various industrial applications requiring a coating material with extremely high thermal conductivity and low electrical conductivity. An approach for the synthesis of diamond films via high-speed jet deposition of thermally activated gas has been applied. In this method, spatially separated high-speed flows of methane and hydrogen were thermally activated, and methyl and hydrogen radicals were deposited on heated molybdenum substrates. The morphology and structure of three diamond films were studied, which were synthesized at a heating power of 900, 1700, or 1800 W, methane flow rate of 10 or 30 sccm, hydrogen flow rate of 1500 or 3500 sccm, and duration of the synthesis from 1.5 to 3 h.The morphology and electronic state of the carbon on the surface and in the bulk of the obtained films were analyzed by scanning electron microscopy, Raman scattering, X-ray photoelectron, and near-edge X-ray absorption fine structure spectroscopies. The diamond micro-crystals with a thick oxidized amorphous sp2-carbon coating were grown at a heating power of 900 W and a hydrogen flow rate of 1500 sccm. The quality of the crystals was improved, and the growth rate of the diamond film was increased seven times when the heating power was 1700-1800Wand the methane and hydrogen flow rates were 30 and 3500 sccm, respectively. Defective octahedral diamond crystals of 30 μm in size with a thin sp2-carbon surface layer were synthesized on a Mo substrate heated at 1273 K for 1.5 h. When the synthesis duration was doubled, and the substrate temperature was decreased to 1073 K, the denser film with rhombic-dodecahedron diamond crystals was grown. In this case, the thinnest hydrogenated sp2-carbon coating was detected on the surface of the diamond crystals.

AB - Diamond films are advanced engineering materials for various industrial applications requiring a coating material with extremely high thermal conductivity and low electrical conductivity. An approach for the synthesis of diamond films via high-speed jet deposition of thermally activated gas has been applied. In this method, spatially separated high-speed flows of methane and hydrogen were thermally activated, and methyl and hydrogen radicals were deposited on heated molybdenum substrates. The morphology and structure of three diamond films were studied, which were synthesized at a heating power of 900, 1700, or 1800 W, methane flow rate of 10 or 30 sccm, hydrogen flow rate of 1500 or 3500 sccm, and duration of the synthesis from 1.5 to 3 h.The morphology and electronic state of the carbon on the surface and in the bulk of the obtained films were analyzed by scanning electron microscopy, Raman scattering, X-ray photoelectron, and near-edge X-ray absorption fine structure spectroscopies. The diamond micro-crystals with a thick oxidized amorphous sp2-carbon coating were grown at a heating power of 900 W and a hydrogen flow rate of 1500 sccm. The quality of the crystals was improved, and the growth rate of the diamond film was increased seven times when the heating power was 1700-1800Wand the methane and hydrogen flow rates were 30 and 3500 sccm, respectively. Defective octahedral diamond crystals of 30 μm in size with a thin sp2-carbon surface layer were synthesized on a Mo substrate heated at 1273 K for 1.5 h. When the synthesis duration was doubled, and the substrate temperature was decreased to 1073 K, the denser film with rhombic-dodecahedron diamond crystals was grown. In this case, the thinnest hydrogenated sp2-carbon coating was detected on the surface of the diamond crystals.

KW - Diamond film

KW - High-speed gas flow

KW - Jet-deposition

KW - NEXAFS

KW - Surface coating

KW - XPS

KW - diamond film

KW - THIN-FILMS

KW - jet-deposition

KW - DEPOSITION

KW - PHOTOELECTRON

KW - X-RAY-ABSORPTION

KW - MECHANICAL-PROPERTIES

KW - CVD

KW - HYDROGEN

KW - surface coating

KW - RAMAN-SPECTRUM

KW - SPECTROSCOPY

KW - high-speed gas flow

KW - ELECTRONIC-STRUCTURE

UR - http://www.scopus.com/inward/record.url?scp=85079767673&partnerID=8YFLogxK

U2 - 10.3390/ma13010219

DO - 10.3390/ma13010219

M3 - Article

C2 - 31947948

AN - SCOPUS:85079767673

VL - 13

JO - Materials

JF - Materials

SN - 1996-1944

IS - 1

M1 - 219

ER -

ID: 23615992