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Structure evolution and charge hysteresis in buried Hafnia-Alumina oxides

Research output: Contribution to journal › Article › peer-review

Department of Physics

DOI

https://doi.org/10.1016/j.sse.2022.108348
Final published version

V. P. Popov
F. V. Tikhonenko
V. A. Antonov
K. A. Tolmachev
A. A. Lomov
A. V. Miakonkikh
K. V. Rudenko

Original language	English
Article number	108348
Journal	Solid-State Electronics
Volume	194
DOIs	https://doi.org/10.1016/j.sse.2022.108348
Publication status	Published - Aug 2022

Research areas

Dipoles, Ferroelectric, GIXRD, high-k BOX, Phases

OECD FOS+WOS

2.02 ELECTRICAL ENG, ELECTRONIC ENG
2.05 MATERIALS ENGINEERING
1.03 PHYSICAL SCIENCES AND ASTRONOMY

ID: 36037154