Structure and elemental composition of transparent nanocomposite silicon oxycarbonitride films

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	119-125
Number of pages	7
Journal	Journal of Structural Chemistry
Volume	58
Issue number	1
DOIs	https://doi.org/10.1134/S0022476617010188
Publication status	Published - 1 Jan 2017

1,1,3,3-tetramethyldisilazane, nanocomposite films, plasma enhanced chemical vapor deposition, silicon oxycarbonitride

ID: 10522373