Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Original language | English |
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Title of host publication | Nanoengineering |
Subtitle of host publication | Fabrication, Properties, Optics, Thin Films, and Devices XVIII |
Editors | Balaji Panchapakesan, Andre-Jean Attias, Wounjhang Park |
Publisher | SPIE |
ISBN (Electronic) | 9781510644427 |
DOIs | |
Publication status | Published - 2021 |
Event | Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII 2021 - San Diego, United States Duration: 1 Aug 2021 → 5 Aug 2021 |
Name | Proceedings of SPIE - The International Society for Optical Engineering |
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Volume | 11802 |
ISSN (Print) | 0277-786X |
ISSN (Electronic) | 1996-756X |
Conference | Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVIII 2021 |
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Country/Territory | United States |
City | San Diego |
Period | 01.08.2021 → 05.08.2021 |
ID: 34339391