Standard

Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. / Volodin, Vladimir A.; Cheng, Yuzhu; Bulgakov, Alexander V. et al.

2023 Conference on Lasers and Electro-Optics, CLEO 2023. Optica Publishing Group, 2023. STh1N.6.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Volodin, VA, Cheng, Y, Bulgakov, AV, Levy, Y, Beránek, J, Nagisetty, SS, Zukerstein, M, Popov, AA & Bulgakova, NM 2023, Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. in 2023 Conference on Lasers and Electro-Optics, CLEO 2023., STh1N.6, Optica Publishing Group. https://doi.org/10.1364/cleo_si.2023.sth1n.6

APA

Volodin, V. A., Cheng, Y., Bulgakov, A. V., Levy, Y., Beránek, J., Nagisetty, S. S., Zukerstein, M., Popov, A. A., & Bulgakova, N. M. (2023). Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. In 2023 Conference on Lasers and Electro-Optics, CLEO 2023 [STh1N.6] Optica Publishing Group. https://doi.org/10.1364/cleo_si.2023.sth1n.6

Vancouver

Volodin VA, Cheng Y, Bulgakov AV, Levy Y, Beránek J, Nagisetty SS et al. Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. In 2023 Conference on Lasers and Electro-Optics, CLEO 2023. Optica Publishing Group. 2023. STh1N.6 doi: 10.1364/cleo_si.2023.sth1n.6

Author

Volodin, Vladimir A. ; Cheng, Yuzhu ; Bulgakov, Alexander V. et al. / Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. 2023 Conference on Lasers and Electro-Optics, CLEO 2023. Optica Publishing Group, 2023.

BibTeX

@inproceedings{c2fb4f93a1aa4c4c869b862c4e069318,
title = "Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks",
abstract = "Selective laser crystallization of germanium in multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium deposited on silicon and glass substrates has been achieved using near- and mid-infrared ultrashort laser pulses.",
author = "Volodin, {Vladimir A.} and Yuzhu Cheng and Bulgakov, {Alexander V.} and Yoann Levy and Ji{\v r}{\'i} Ber{\'a}nek and Nagisetty, {Siva S.} and Martin Zukerstein and Popov, {Alexander A.} and Bulgakova, {Nadezhda M.}",
note = "The study of V.A.V. and Y.C. was supported by the Ministry of Science and Higher Education of the Russian Federation, project No. 075-15-2020-797 (13.1902.21.0024). Публикация для корректировки.",
year = "2023",
doi = "10.1364/cleo_si.2023.sth1n.6",
language = "English",
isbn = "9781957171258",
booktitle = "2023 Conference on Lasers and Electro-Optics, CLEO 2023",
publisher = "Optica Publishing Group",
address = "United States",

}

RIS

TY - GEN

T1 - Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks

AU - Volodin, Vladimir A.

AU - Cheng, Yuzhu

AU - Bulgakov, Alexander V.

AU - Levy, Yoann

AU - Beránek, Jiří

AU - Nagisetty, Siva S.

AU - Zukerstein, Martin

AU - Popov, Alexander A.

AU - Bulgakova, Nadezhda M.

N1 - The study of V.A.V. and Y.C. was supported by the Ministry of Science and Higher Education of the Russian Federation, project No. 075-15-2020-797 (13.1902.21.0024). Публикация для корректировки.

PY - 2023

Y1 - 2023

N2 - Selective laser crystallization of germanium in multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium deposited on silicon and glass substrates has been achieved using near- and mid-infrared ultrashort laser pulses.

AB - Selective laser crystallization of germanium in multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium deposited on silicon and glass substrates has been achieved using near- and mid-infrared ultrashort laser pulses.

UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85176290878&origin=inward&txGid=00c4a1f3b1ca522fb2e99f3f3e83996d

UR - https://www.mendeley.com/catalogue/0f1483cb-b8c0-387d-8a73-2c4d0bf44f8e/

U2 - 10.1364/cleo_si.2023.sth1n.6

DO - 10.1364/cleo_si.2023.sth1n.6

M3 - Conference contribution

SN - 9781957171258

BT - 2023 Conference on Lasers and Electro-Optics, CLEO 2023

PB - Optica Publishing Group

ER -

ID: 59194115