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Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. / Volodin, Vladimir A.; Cheng, Yuzhu; Bulgakov, Alexander V. et al.

CLEO: Science and Innovations, CLEO:S and I 2023. Optical Society of America (OSA), 2023. (CLEO: Science and Innovations, CLEO:S and I 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Volodin, VA, Cheng, Y, Bulgakov, AV, Levy, Y, Beránek, J, Nagisetty, SS, Zukerstein, M, Popov, AA & Bulgakova, NM 2023, Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. in CLEO: Science and Innovations, CLEO:S and I 2023. CLEO: Science and Innovations, CLEO:S and I 2023, Optical Society of America (OSA), CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023, San Jose, United States, 07.05.2023. https://doi.org/10.1364/CLEO_AT.2023.STh1N.6

APA

Volodin, V. A., Cheng, Y., Bulgakov, A. V., Levy, Y., Beránek, J., Nagisetty, S. S., Zukerstein, M., Popov, A. A., & Bulgakova, N. M. (2023). Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. In CLEO: Science and Innovations, CLEO:S and I 2023 (CLEO: Science and Innovations, CLEO:S and I 2023). Optical Society of America (OSA). https://doi.org/10.1364/CLEO_AT.2023.STh1N.6

Vancouver

Volodin VA, Cheng Y, Bulgakov AV, Levy Y, Beránek J, Nagisetty SS et al. Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. In CLEO: Science and Innovations, CLEO:S and I 2023. Optical Society of America (OSA). 2023. (CLEO: Science and Innovations, CLEO:S and I 2023). doi: 10.1364/CLEO_AT.2023.STh1N.6

Author

Volodin, Vladimir A. ; Cheng, Yuzhu ; Bulgakov, Alexander V. et al. / Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks. CLEO: Science and Innovations, CLEO:S and I 2023. Optical Society of America (OSA), 2023. (CLEO: Science and Innovations, CLEO:S and I 2023).

BibTeX

@inproceedings{199132b91e3e463b85ec96bd102e8a6d,
title = "Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks",
abstract = "Selective laser crystallization of germanium in multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium deposited on silicon and glass substrates has been achieved using near- and mid-infrared ultrashort laser pulses.",
author = "Volodin, {Vladimir A.} and Yuzhu Cheng and Bulgakov, {Alexander V.} and Yoann Levy and Ji{\v r}{\'i} Ber{\'a}nek and Nagisetty, {Siva S.} and Martin Zukerstein and Popov, {Alexander A.} and Bulgakova, {Nadezhda M.}",
note = "The study of V.A.V. and Y.C. was supported by the Ministry of Science and Higher Education of the Russian Federation, project No. 075-15-2020-797 (13.1902.21.0024). Публикация для корректировки.; CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023, CLEO:S and I ; Conference date: 07-05-2023 Through 12-05-2023",
year = "2023",
doi = "10.1364/CLEO_AT.2023.STh1N.6",
language = "English",
isbn = "9781957171258",
series = "CLEO: Science and Innovations, CLEO:S and I 2023",
publisher = "Optical Society of America (OSA)",
booktitle = "CLEO: Science and Innovations, CLEO:S and I 2023",

}

RIS

TY - GEN

T1 - Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks

AU - Volodin, Vladimir A.

AU - Cheng, Yuzhu

AU - Bulgakov, Alexander V.

AU - Levy, Yoann

AU - Beránek, Jiří

AU - Nagisetty, Siva S.

AU - Zukerstein, Martin

AU - Popov, Alexander A.

AU - Bulgakova, Nadezhda M.

N1 - The study of V.A.V. and Y.C. was supported by the Ministry of Science and Higher Education of the Russian Federation, project No. 075-15-2020-797 (13.1902.21.0024). Публикация для корректировки.

PY - 2023

Y1 - 2023

N2 - Selective laser crystallization of germanium in multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium deposited on silicon and glass substrates has been achieved using near- and mid-infrared ultrashort laser pulses.

AB - Selective laser crystallization of germanium in multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium deposited on silicon and glass substrates has been achieved using near- and mid-infrared ultrashort laser pulses.

UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85191516085&origin=inward&txGid=11adfad74bc8c93175392a620e56962a

UR - https://www.mendeley.com/catalogue/f3368920-4820-3b78-af26-cd883ec4d1a4/

U2 - 10.1364/CLEO_AT.2023.STh1N.6

DO - 10.1364/CLEO_AT.2023.STh1N.6

M3 - Conference contribution

SN - 9781957171258

T3 - CLEO: Science and Innovations, CLEO:S and I 2023

BT - CLEO: Science and Innovations, CLEO:S and I 2023

PB - Optical Society of America (OSA)

T2 - CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023

Y2 - 7 May 2023 through 12 May 2023

ER -

ID: 59944255