Cherkova, S. G.,
Volodin, V. A.,
Skuratov, V. A.,
Stoffel, M.,
Rinnert, H. &
Vergnat, M.,
1 Jan 2019,
International Conference on Micro- and Nano-Electronics 2018. Lukichev, V. F. & Rudenko, K. V. (eds.).
The International Society for Optical Engineering,
Vol. 11022.
8 p. 1102214. (Proceedings of SPIE; vol. 11022).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review