Dostovalov, A. V.,
Korolkov, V. P.,
Terentiev, V. S.,
Okotrub, K. A.,
Dultsev, F. N.,
Nemykin, A. &
Babin, S. A.,
1 Jan 2017,
Laser-Based Micro- and Nanoprocessing XI. Klotzbach, U., Washio, K. & Kling, R. (eds.).
SPIE,
Vol. 10092.
9 p. 100921H. (Proceedings of SPIE; vol. 10092).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review