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Review of Surface Modification Technologies for Mid-Infrared Antireflection Microstructures Fabrication

Research output: Contribution to journal › Review article › peer-review

Лаборатория функциональных материалов ФФ

DOI

https://doi.org/10.1002/lpor.202000202
Final published version

Original language	English
Article number	2000202
Journal	Laser and Photonics Reviews
Volume	15
Issue number	5
DOIs	https://doi.org/10.1002/lpor.202000202
Publication status	Published - May 2021

OECD FOS+WOS

2.05 MATERIALS ENGINEERING
1.03 PHYSICAL SCIENCES AND ASTRONOMY

Research areas

antireflection, colloids, etching, laser ablation, lithography, microstructures, mid–infrared, nanostructures

ID: 28133949