DOI

  • Irina B. Mishchenko
  • Darya E. Petukhova
  • Mikhail S. Lebedev
Original languageEnglish
Title of host publication2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 - Proceedings
PublisherIEEE Computer Society
Pages26-29
Number of pages4
Volume2018-July
ISBN (Print)9781538650219
DOIs
Publication statusPublished - 13 Aug 2018
Event19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018 - Erlagol, Altai, Russian Federation
Duration: 29 Jun 20183 Jul 2018

Conference

Conference19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM 2018
Country/TerritoryRussian Federation
CityErlagol, Altai
Period29.06.201803.07.2018

    Research areas

  • ALD, Dispersion model, Ellipsometry, Stack, Superlattice

ID: 16265413