Research output: Contribution to journal › Article › peer-review
Reflection Spectra of Microarrays of Silicon Nanopillars. / Basalaeva, L. S.; Nastaushev, Yu V.; Dultsev, F. N. et al.
In: Optics and Spectroscopy (English translation of Optika i Spektroskopiya), Vol. 124, No. 5, 01.05.2018, p. 730-734.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Reflection Spectra of Microarrays of Silicon Nanopillars
AU - Basalaeva, L. S.
AU - Nastaushev, Yu V.
AU - Dultsev, F. N.
AU - Kryzhanovskaya, N. V.
AU - Moiseev, E. I.
PY - 2018/5/1
Y1 - 2018/5/1
N2 - The optical-reflection spectra of microarrays of silicon nanopillars are studied in the visible and near-IR regions. The microarrays of silicon nanopillars are formed by electron-beam lithography and reactive ion etching. The reflection spectra of nanopillar arrays with pitches of 400, 600, 800, and 1000 nm are measured. The height of nanopillars in the array is 0.5 μm, and the diameter varies from 150 to 240 nm. It is noted that the spectral features of the reflection are caused by increased absorption of individual nanopillars and interference effects inside the array. A relation between the geometric parameters of nanopillars and the resonance reflection characteristics is determined taking into account the influence of the substrate.
AB - The optical-reflection spectra of microarrays of silicon nanopillars are studied in the visible and near-IR regions. The microarrays of silicon nanopillars are formed by electron-beam lithography and reactive ion etching. The reflection spectra of nanopillar arrays with pitches of 400, 600, 800, and 1000 nm are measured. The height of nanopillars in the array is 0.5 μm, and the diameter varies from 150 to 240 nm. It is noted that the spectral features of the reflection are caused by increased absorption of individual nanopillars and interference effects inside the array. A relation between the geometric parameters of nanopillars and the resonance reflection characteristics is determined taking into account the influence of the substrate.
KW - NANOWIRE ARRAYS
KW - DIFFRACTION
KW - ABSORPTION
UR - http://www.scopus.com/inward/record.url?scp=85049236509&partnerID=8YFLogxK
U2 - 10.1134/S0030400X1805003X
DO - 10.1134/S0030400X1805003X
M3 - Article
AN - SCOPUS:85049236509
VL - 124
SP - 730
EP - 734
JO - Optics and Spectroscopy (English translation of Optika i Spektroskopiya)
JF - Optics and Spectroscopy (English translation of Optika i Spektroskopiya)
SN - 0030-400X
IS - 5
ER -
ID: 14316727