Research output: Contribution to journal › Article › peer-review
Peculiarities of the AlN crystalline phase formation in a result of the electron-stimulated reconstruction transition (√31×√31)R ± 9° − (1 × 1). / Milakhin, D. S.; Malin, T. V.; Mansurov, V. G. et al.
In: Applied Surface Science, Vol. 541, 148548, 01.03.2021.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Peculiarities of the AlN crystalline phase formation in a result of the electron-stimulated reconstruction transition (√31×√31)R ± 9° − (1 × 1)
AU - Milakhin, D. S.
AU - Malin, T. V.
AU - Mansurov, V. G.
AU - Galitsyn, Yu G.
AU - Kozhukhov, A. S.
AU - Utkin, D. E.
AU - Zhuravlev, K. S.
N1 - Funding Information: This work was financially supported by the Russian Foundation for Basic Research (Grants No. 21-52-46001 and No. 21-52-15009 ). The SEM and AFM diagnostics were performed on the equipment of Core Facilities Centre «Technologies for nanostructuring of semiconductor, metal, carbon, bioorganic materials and analytical methods for their study at the nanoscale» (CKP «Nanostructure»). Publisher Copyright: © 2020 Elsevier B.V. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2021/3/1
Y1 - 2021/3/1
N2 - In the present work, it was found for the first time that an electron beam used in reflection high-energy electron diffraction technique stimulates a reconstruction transition from a sapphire (√31×√31)R ± 9° superstructure which is chemically inert under an ammonia flux to an unreconstructed (1 × 1) structure with subsequent surface nitridation. The electron beam initiates electron-stimulated oxygen desorption from the sapphire surface followed by formation of oxygen vacancies, which are potential energetically accessible centers for the primary nuclei formation of the AlN crystalline phase.
AB - In the present work, it was found for the first time that an electron beam used in reflection high-energy electron diffraction technique stimulates a reconstruction transition from a sapphire (√31×√31)R ± 9° superstructure which is chemically inert under an ammonia flux to an unreconstructed (1 × 1) structure with subsequent surface nitridation. The electron beam initiates electron-stimulated oxygen desorption from the sapphire surface followed by formation of oxygen vacancies, which are potential energetically accessible centers for the primary nuclei formation of the AlN crystalline phase.
KW - (√31×√31)R±9° superstructure
KW - Aluminum nitride
KW - Ammonia molecular-beam epitaxy
KW - Reflection high-energy electron diffraction
KW - Sapphire
UR - http://www.scopus.com/inward/record.url?scp=85097081099&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2020.148548
DO - 10.1016/j.apsusc.2020.148548
M3 - Article
AN - SCOPUS:85097081099
VL - 541
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
M1 - 148548
ER -
ID: 26206442