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Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data. / Kruchinin, V. N.; Spesivtsev, E. V.; Rykhlitsky, C. V. et al.

In: Optics and Spectroscopy, Vol. 131, No. 7, 07.2023, p. 550-553.

Research output: Contribution to journal › Article › peer-review

Harvard

Kruchinin, VN, Spesivtsev, EV, Rykhlitsky, CV, Gritsenko, VA, Mehmood, F, Mikolajick, T & Schroeder, U 2023, 'Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data', Optics and Spectroscopy, vol. 131, no. 7, pp. 550-553. https://doi.org/10.1134/S0030400X23050107

APA

Kruchinin, V. N., Spesivtsev, E. V., Rykhlitsky, C. V., Gritsenko, V. A., Mehmood, F., Mikolajick, T., & Schroeder, U. (2023). Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data. Optics and Spectroscopy, 131(7), 550-553. https://doi.org/10.1134/S0030400X23050107

Vancouver

Kruchinin VN, Spesivtsev EV, Rykhlitsky CV, Gritsenko VA, Mehmood F, Mikolajick T et al. Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data. Optics and Spectroscopy. 2023 Jul;131(7):550-553. doi: 10.1134/S0030400X23050107

Author

Kruchinin, V. N. ; Spesivtsev, E. V. ; Rykhlitsky, C. V. et al. / Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data. In: Optics and Spectroscopy. 2023 ; Vol. 131, No. 7. pp. 550-553.

BibTeX

@article{e1988c4401f249feb92bc42db68a06a7,
title = "Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data",
abstract = "Recently ferroelectric properties have been found in hafnia-based nanosized films. Such films are of the utmost interest for development of a universal memory, which combines the advantages of random access memory and flash memory. The paper studies optical properties of hafnia-zirconium oxide films H-fxZryO2 and lanthanum-alloyed hafnia-zirconium oxide films La:HfxZryO2. Fluctuations of thickness in HfxZryO2 do not exceed 3.5%, fluctuations of thickness in La:HfxZryO2 films—3.2%. Optical properties are analyzed based on effective-medium theory. According to effective-medium theory data, HfxZryO2 films contain 46% HfO2, 54% ZrO2, La:HfxZryO2 films contain 47.5% HfO2, 52.4% ZrO2, 2.5% La2O3.",
keywords = "effective-medium theory, ferroelectric, refraction index, spectral ellipsometry",
author = "Kruchinin, {V. N.} and Spesivtsev, {E. V.} and Rykhlitsky, {C. V.} and Gritsenko, {V. A.} and F. Mehmood and T. Mikolajick and U. Schroeder",
note = "The research was conducted within the project by the Russian Foundation for Basic Research no. 20-57-12003 (ellipsometric measurements) and state assignment no. 030-62019-0005 (analysis of data based on effective-medium theory). Публикация для корректировки.",
year = "2023",
month = jul,
doi = "10.1134/S0030400X23050107",
language = "English",
volume = "131",
pages = "550--553",
journal = "Optics and Spectroscopy (English translation of Optika i Spektroskopiya)",
issn = "0030-400X",
publisher = "Maik Nauka Publishing / Springer SBM",
number = "7",

}

RIS

TY - JOUR

T1 - Optical Properties of Ferroelectric Films HfxZryO2 and La:HfxZryO2 according to Ellipsometry Data

AU - Kruchinin, V. N.

AU - Spesivtsev, E. V.

AU - Rykhlitsky, C. V.

AU - Gritsenko, V. A.

AU - Mehmood, F.

AU - Mikolajick, T.

AU - Schroeder, U.

N1 - The research was conducted within the project by the Russian Foundation for Basic Research no. 20-57-12003 (ellipsometric measurements) and state assignment no. 030-62019-0005 (analysis of data based on effective-medium theory). Публикация для корректировки.

PY - 2023/7

Y1 - 2023/7

N2 - Recently ferroelectric properties have been found in hafnia-based nanosized films. Such films are of the utmost interest for development of a universal memory, which combines the advantages of random access memory and flash memory. The paper studies optical properties of hafnia-zirconium oxide films H-fxZryO2 and lanthanum-alloyed hafnia-zirconium oxide films La:HfxZryO2. Fluctuations of thickness in HfxZryO2 do not exceed 3.5%, fluctuations of thickness in La:HfxZryO2 films—3.2%. Optical properties are analyzed based on effective-medium theory. According to effective-medium theory data, HfxZryO2 films contain 46% HfO2, 54% ZrO2, La:HfxZryO2 films contain 47.5% HfO2, 52.4% ZrO2, 2.5% La2O3.

AB - Recently ferroelectric properties have been found in hafnia-based nanosized films. Such films are of the utmost interest for development of a universal memory, which combines the advantages of random access memory and flash memory. The paper studies optical properties of hafnia-zirconium oxide films H-fxZryO2 and lanthanum-alloyed hafnia-zirconium oxide films La:HfxZryO2. Fluctuations of thickness in HfxZryO2 do not exceed 3.5%, fluctuations of thickness in La:HfxZryO2 films—3.2%. Optical properties are analyzed based on effective-medium theory. According to effective-medium theory data, HfxZryO2 films contain 46% HfO2, 54% ZrO2, La:HfxZryO2 films contain 47.5% HfO2, 52.4% ZrO2, 2.5% La2O3.

KW - effective-medium theory

KW - ferroelectric

KW - refraction index

KW - spectral ellipsometry

UR - https://www.scopus.com/record/display.uri?eid=2-s2.0-85188926348&origin=inward&txGid=7763383f517853a24c7f212679604694

UR - https://www.mendeley.com/catalogue/6ae5caac-5366-3428-a655-35938f1c7e18/

U2 - 10.1134/S0030400X23050107

DO - 10.1134/S0030400X23050107

M3 - Article

VL - 131

SP - 550

EP - 553

JO - Optics and Spectroscopy (English translation of Optika i Spektroskopiya)

JF - Optics and Spectroscopy (English translation of Optika i Spektroskopiya)

SN - 0030-400X

IS - 7

ER -

ID: 59888465