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Optical measuring and laser technologies for scientific and industrial applications. / Chugui, Yuri V.; Verkhoglyad, Alexander G.; Zavyalov, Petr S. et al.

In: International Journal of Automation Technology, Vol. 9, No. 5, 01.09.2015, p. 515-524.

Research output: Contribution to journal › Article › peer-review

Harvard

Chugui, YV, Verkhoglyad, AG, Zavyalov, PS, Sysoev, EV, Kulikov, RV, Vykhristyuk, IA, Zavyalova, MA, Poleshchuk, AG & Korolkov, VP 2015, 'Optical measuring and laser technologies for scientific and industrial applications', International Journal of Automation Technology, vol. 9, no. 5, pp. 515-524. https://doi.org/10.20965/ijat.2015.p0515

APA

Chugui, Y. V., Verkhoglyad, A. G., Zavyalov, P. S., Sysoev, E. V., Kulikov, R. V., Vykhristyuk, I. A., Zavyalova, M. A., Poleshchuk, A. G., & Korolkov, V. P. (2015). Optical measuring and laser technologies for scientific and industrial applications. International Journal of Automation Technology, 9(5), 515-524. https://doi.org/10.20965/ijat.2015.p0515

Vancouver

Chugui YV, Verkhoglyad AG, Zavyalov PS, Sysoev EV, Kulikov RV, Vykhristyuk IA et al. Optical measuring and laser technologies for scientific and industrial applications. International Journal of Automation Technology. 2015 Sept 1;9(5):515-524. doi: 10.20965/ijat.2015.p0515

Author

Chugui, Yuri V. ; Verkhoglyad, Alexander G. ; Zavyalov, Petr S. et al. / Optical measuring and laser technologies for scientific and industrial applications. In: International Journal of Automation Technology. 2015 ; Vol. 9, No. 5. pp. 515-524.

BibTeX

@article{c0065ade07b843d9bee4396d3ee98e17,
title = "Optical measuring and laser technologies for scientific and industrial applications",
abstract = "Modern industry and science require novel 3D optical measuring systems and laser technologies with micrometer/ nanometer resolutions. To solve actual problems, we have developed a family of these optical measuring systems and technologies. An optical system for the 3D inspection of ceramic parts is described. A new approach to the formation of 3D laser templates using diffractive optics is presented for large objects, such as ∼ 30 m antennas. The performance specifications of a 3D super resolution, optical low-coherent micro/nano profilometer are given. Using a perfectly smooth atomic mirror as a reference object, a breakthrough depth measurement with resolution of 20 picometers is achieved. The newest results in the field of laser technologies for the high-precision synthesis of microstructures by an updated laser circular image generator using the semiconductor laser is presented. The measuring systems and the laser image generator have been tested by customers and are used in different branches of industry and science.",
keywords = "3D optical inspection, Diffractive optical element, Laser circular image generator, Nano profilometer, Pico resolution",
author = "Chugui, {Yuri V.} and Verkhoglyad, {Alexander G.} and Zavyalov, {Petr S.} and Sysoev, {Evgeny V.} and Kulikov, {Rodion V.} and Vykhristyuk, {Ignat A.} and Zavyalova, {Marina A.} and Poleshchuk, {Alexander G.} and Korolkov, {Victor P.}",
year = "2015",
month = sep,
day = "1",
doi = "10.20965/ijat.2015.p0515",
language = "English",
volume = "9",
pages = "515--524",
journal = "International Journal of Automation Technology",
issn = "1881-7629",
publisher = "Fuji Technology Press",
number = "5",

}

RIS

TY - JOUR

T1 - Optical measuring and laser technologies for scientific and industrial applications

AU - Chugui, Yuri V.

AU - Verkhoglyad, Alexander G.

AU - Zavyalov, Petr S.

AU - Sysoev, Evgeny V.

AU - Kulikov, Rodion V.

AU - Vykhristyuk, Ignat A.

AU - Zavyalova, Marina A.

AU - Poleshchuk, Alexander G.

AU - Korolkov, Victor P.

PY - 2015/9/1

Y1 - 2015/9/1

N2 - Modern industry and science require novel 3D optical measuring systems and laser technologies with micrometer/ nanometer resolutions. To solve actual problems, we have developed a family of these optical measuring systems and technologies. An optical system for the 3D inspection of ceramic parts is described. A new approach to the formation of 3D laser templates using diffractive optics is presented for large objects, such as ∼ 30 m antennas. The performance specifications of a 3D super resolution, optical low-coherent micro/nano profilometer are given. Using a perfectly smooth atomic mirror as a reference object, a breakthrough depth measurement with resolution of 20 picometers is achieved. The newest results in the field of laser technologies for the high-precision synthesis of microstructures by an updated laser circular image generator using the semiconductor laser is presented. The measuring systems and the laser image generator have been tested by customers and are used in different branches of industry and science.

AB - Modern industry and science require novel 3D optical measuring systems and laser technologies with micrometer/ nanometer resolutions. To solve actual problems, we have developed a family of these optical measuring systems and technologies. An optical system for the 3D inspection of ceramic parts is described. A new approach to the formation of 3D laser templates using diffractive optics is presented for large objects, such as ∼ 30 m antennas. The performance specifications of a 3D super resolution, optical low-coherent micro/nano profilometer are given. Using a perfectly smooth atomic mirror as a reference object, a breakthrough depth measurement with resolution of 20 picometers is achieved. The newest results in the field of laser technologies for the high-precision synthesis of microstructures by an updated laser circular image generator using the semiconductor laser is presented. The measuring systems and the laser image generator have been tested by customers and are used in different branches of industry and science.

KW - 3D optical inspection

KW - Diffractive optical element

KW - Laser circular image generator

KW - Nano profilometer

KW - Pico resolution

UR - http://www.scopus.com/inward/record.url?scp=84940838150&partnerID=8YFLogxK

U2 - 10.20965/ijat.2015.p0515

DO - 10.20965/ijat.2015.p0515

M3 - Article

AN - SCOPUS:84940838150

VL - 9

SP - 515

EP - 524

JO - International Journal of Automation Technology

JF - International Journal of Automation Technology

SN - 1881-7629

IS - 5

ER -

ID: 25331889