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On-chip Piezoelectric Actuation of Nanomechanical Resonators Containing a Two-dimensional Electron Gas. / Shevyrin, A. A.; Bakarov, A. K.; Shklyaev, A. A. et al.

In: JETP Letters, Vol. 109, No. 4, 01.02.2019, p. 261-265.

Research output: Contribution to journal › Article › peer-review

Harvard

Shevyrin, AA, Bakarov, AK, Shklyaev, AA, Arakcheev, AS, Kurosu, M, Yamaguchi, H & Pogosov, AG 2019, 'On-chip Piezoelectric Actuation of Nanomechanical Resonators Containing a Two-dimensional Electron Gas', JETP Letters, vol. 109, no. 4, pp. 261-265. https://doi.org/10.1134/S0021364019040052

APA

Shevyrin, A. A., Bakarov, A. K., Shklyaev, A. A., Arakcheev, A. S., Kurosu, M., Yamaguchi, H., & Pogosov, A. G. (2019). On-chip Piezoelectric Actuation of Nanomechanical Resonators Containing a Two-dimensional Electron Gas. JETP Letters, 109(4), 261-265. https://doi.org/10.1134/S0021364019040052

Vancouver

Shevyrin AA, Bakarov AK, Shklyaev AA, Arakcheev AS, Kurosu M, Yamaguchi H et al. On-chip Piezoelectric Actuation of Nanomechanical Resonators Containing a Two-dimensional Electron Gas. JETP Letters. 2019 Feb 1;109(4):261-265. doi: 10.1134/S0021364019040052

Author

Shevyrin, A. A. ; Bakarov, A. K. ; Shklyaev, A. A. et al. / On-chip Piezoelectric Actuation of Nanomechanical Resonators Containing a Two-dimensional Electron Gas. In: JETP Letters. 2019 ; Vol. 109, No. 4. pp. 261-265.

BibTeX

@article{3730ad742a1d479da945e5af31c473bd,
title = "On-chip Piezoelectric Actuation of Nanomechanical Resonators Containing a Two-dimensional Electron Gas",
abstract = "The on-chip piezoelectric actuation is experimentally shown to be a suitable method for driving the resonant vibrations of AlGaAs/GaAs-based nanomechanical resonators containing a two-dimensional electron gas. Both flexural and torsional vibrations of 166 nm-thick cantilevers and doubly clamped beams can be driven using this method at room temperature. At least two points should be addressed when reducing the size of the piezoelectrically-driven resonators. First, as shown in the paper, the parasitic attenuation of the driving electrical signal becomes the main factor limiting the actuation efficiency at the eigenfrequencies increased to the megahertz range due to the size reduction. Second, thin and relatively long bridge-like AlGaAs/GaAsbased resonators are prone to the Euler buckling instability caused by the longitudinal compressive stress. It is demonstrated that the buckling does not hinder the actuation at near-critical compression. However, a large super-critical compression can lead to a complete suppression of the piezoelectrically-driven vibrations. A method to avoid this suppression is proposed.",
keywords = "SYSTEMS",
author = "Shevyrin, {A. A.} and Bakarov, {A. K.} and Shklyaev, {A. A.} and Arakcheev, {A. S.} and M. Kurosu and H. Yamaguchi and Pogosov, {A. G.}",
year = "2019",
month = feb,
day = "1",
doi = "10.1134/S0021364019040052",
language = "English",
volume = "109",
pages = "261--265",
journal = "JETP Letters",
issn = "0021-3640",
publisher = "MAIK NAUKA/INTERPERIODICA/SPRINGER",
number = "4",

}

RIS

TY - JOUR

T1 - On-chip Piezoelectric Actuation of Nanomechanical Resonators Containing a Two-dimensional Electron Gas

AU - Shevyrin, A. A.

AU - Bakarov, A. K.

AU - Shklyaev, A. A.

AU - Arakcheev, A. S.

AU - Kurosu, M.

AU - Yamaguchi, H.

AU - Pogosov, A. G.

PY - 2019/2/1

Y1 - 2019/2/1

N2 - The on-chip piezoelectric actuation is experimentally shown to be a suitable method for driving the resonant vibrations of AlGaAs/GaAs-based nanomechanical resonators containing a two-dimensional electron gas. Both flexural and torsional vibrations of 166 nm-thick cantilevers and doubly clamped beams can be driven using this method at room temperature. At least two points should be addressed when reducing the size of the piezoelectrically-driven resonators. First, as shown in the paper, the parasitic attenuation of the driving electrical signal becomes the main factor limiting the actuation efficiency at the eigenfrequencies increased to the megahertz range due to the size reduction. Second, thin and relatively long bridge-like AlGaAs/GaAsbased resonators are prone to the Euler buckling instability caused by the longitudinal compressive stress. It is demonstrated that the buckling does not hinder the actuation at near-critical compression. However, a large super-critical compression can lead to a complete suppression of the piezoelectrically-driven vibrations. A method to avoid this suppression is proposed.

AB - The on-chip piezoelectric actuation is experimentally shown to be a suitable method for driving the resonant vibrations of AlGaAs/GaAs-based nanomechanical resonators containing a two-dimensional electron gas. Both flexural and torsional vibrations of 166 nm-thick cantilevers and doubly clamped beams can be driven using this method at room temperature. At least two points should be addressed when reducing the size of the piezoelectrically-driven resonators. First, as shown in the paper, the parasitic attenuation of the driving electrical signal becomes the main factor limiting the actuation efficiency at the eigenfrequencies increased to the megahertz range due to the size reduction. Second, thin and relatively long bridge-like AlGaAs/GaAsbased resonators are prone to the Euler buckling instability caused by the longitudinal compressive stress. It is demonstrated that the buckling does not hinder the actuation at near-critical compression. However, a large super-critical compression can lead to a complete suppression of the piezoelectrically-driven vibrations. A method to avoid this suppression is proposed.

KW - SYSTEMS

UR - http://www.scopus.com/inward/record.url?scp=85061447758&partnerID=8YFLogxK

U2 - 10.1134/S0021364019040052

DO - 10.1134/S0021364019040052

M3 - Article

AN - SCOPUS:85061447758

VL - 109

SP - 261

EP - 265

JO - JETP Letters

JF - JETP Letters

SN - 0021-3640

IS - 4

ER -

ID: 18561132