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Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen. / Demin, Nikon; Fedoseev, Alexander; Sukhinin, Gennady et al.

Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 657-661 9242073 (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Harvard

Demin, N, Fedoseev, A, Sukhinin, G & Isupov, M 2020, Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen. in Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020., 9242073, Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020, Institute of Electrical and Electronics Engineers Inc., pp. 657-661, 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020, Virtual, Tomsk, Russian Federation, 14.09.2020. https://doi.org/10.1109/EFRE47760.2020.9242073

APA

Demin, N., Fedoseev, A., Sukhinin, G., & Isupov, M. (2020). Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen. In Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 (pp. 657-661). [9242073] (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/EFRE47760.2020.9242073

Vancouver

Demin N, Fedoseev A, Sukhinin G, Isupov M. Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen. In Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc. 2020. p. 657-661. 9242073. (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020). doi: 10.1109/EFRE47760.2020.9242073

Author

Demin, Nikon ; Fedoseev, Alexander ; Sukhinin, Gennady et al. / Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen. Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 657-661 (Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020).

BibTeX

@inproceedings{e2c5a52a76b14a889773001b559de2e8,
title = "Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen",
abstract = "Global model for a low-frequency inductive discharge in pure oxygen is presented. Calculations of all basic plasma parameters were performed in a range of gas pressure of 0.1-10 Pa and a range of discharge power of 100-4000W for a large gas discharge chamber. It was found that plasma electronegativity changes non-monotonously with gas pressure and discharge power with a maximum at gas pressure of 1 Pa and discharge power of 1000 W.",
keywords = "Ferromagnetic enhanced ICP, Global model, Large scale plasma processingio, Oxygen discharge",
author = "Nikon Demin and Alexander Fedoseev and Gennady Sukhinin and Mikhail Isupov",
note = "Funding Information: The work was supported by the Russian Science Foundation, grant No. 18-19-00205. Funding Information: ACKNOWLEDGMENT The work was supported by the Russian Science Foundation, grant No. 18-19-00205. Publisher Copyright: {\textcopyright} 2020 IEEE. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 ; Conference date: 14-09-2020 Through 26-09-2020",
year = "2020",
month = sep,
day = "14",
doi = "10.1109/EFRE47760.2020.9242073",
language = "English",
series = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "657--661",
booktitle = "Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020",
address = "United States",

}

RIS

TY - GEN

T1 - Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen

AU - Demin, Nikon

AU - Fedoseev, Alexander

AU - Sukhinin, Gennady

AU - Isupov, Mikhail

N1 - Funding Information: The work was supported by the Russian Science Foundation, grant No. 18-19-00205. Funding Information: ACKNOWLEDGMENT The work was supported by the Russian Science Foundation, grant No. 18-19-00205. Publisher Copyright: © 2020 IEEE. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.

PY - 2020/9/14

Y1 - 2020/9/14

N2 - Global model for a low-frequency inductive discharge in pure oxygen is presented. Calculations of all basic plasma parameters were performed in a range of gas pressure of 0.1-10 Pa and a range of discharge power of 100-4000W for a large gas discharge chamber. It was found that plasma electronegativity changes non-monotonously with gas pressure and discharge power with a maximum at gas pressure of 1 Pa and discharge power of 1000 W.

AB - Global model for a low-frequency inductive discharge in pure oxygen is presented. Calculations of all basic plasma parameters were performed in a range of gas pressure of 0.1-10 Pa and a range of discharge power of 100-4000W for a large gas discharge chamber. It was found that plasma electronegativity changes non-monotonously with gas pressure and discharge power with a maximum at gas pressure of 1 Pa and discharge power of 1000 W.

KW - Ferromagnetic enhanced ICP

KW - Global model

KW - Large scale plasma processingio

KW - Oxygen discharge

UR - http://www.scopus.com/inward/record.url?scp=85097631223&partnerID=8YFLogxK

U2 - 10.1109/EFRE47760.2020.9242073

DO - 10.1109/EFRE47760.2020.9242073

M3 - Conference contribution

AN - SCOPUS:85097631223

T3 - Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

SP - 657

EP - 661

BT - Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Y2 - 14 September 2020 through 26 September 2020

ER -

ID: 27086611