Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen › Research Explorer

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Numerical modelling of ferromagnetic enhanced inductively coupled plasma discharge parameters in oxygen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

DOI

https://doi.org/10.1109/EFRE47760.2020.9242073
Final published version

Nikon Demin
Alexander Fedoseev
Gennady Sukhinin
Mikhail Isupov

Original language	English
Title of host publication	Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	657-661
Number of pages	5
ISBN (Electronic)	9781728126869
DOIs	https://doi.org/10.1109/EFRE47760.2020.9242073
Publication status	Published - 14 Sept 2020
Event	7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020 - Virtual, Tomsk, Russian Federation Duration: 14 Sept 2020 → 26 Sept 2020

Publication series

Name	Proceedings - 2020 7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020

Conference

Conference	7th International Congress on Energy Fluxes and Radiation Effects, EFRE 2020
Country/Territory	Russian Federation
City	Virtual, Tomsk
Period	14.09.2020 → 26.09.2020

Research areas

Ferromagnetic enhanced ICP, Global model, Large scale plasma processingio, Oxygen discharge

ID: 27086611