Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Original language | English |
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Title of host publication | International Conference on Micro- and Nano-Electronics 2018 |
Editors | Vladimir F. Lukichev, Konstantin V. Rudenko |
Publisher | SPIE |
Number of pages | 10 |
Volume | 11022 |
ISBN (Electronic) | 9781510627093 |
DOIs | |
Publication status | Published - 1 Jan 2019 |
Event | International Conference on Micro- and Nano-Electronics 2018, ICMNE 2018 - Zvenigorod, Russian Federation Duration: 1 Oct 2018 → 5 Oct 2018 |
Name | Proceedings of SPIE |
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Publisher | SPIE-INT SOC OPTICAL ENGINEERING |
Volume | 11022 |
ISSN (Print) | 0277-786X |
Conference | International Conference on Micro- and Nano-Electronics 2018, ICMNE 2018 |
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Country/Territory | Russian Federation |
City | Zvenigorod |
Period | 01.10.2018 → 05.10.2018 |
ID: 19039903