Research output: Contribution to journal › Article › peer-review
| Original language | English | 
|---|---|
| Pages (from-to) | S30-S37 | 
| Number of pages | 8 | 
| Journal | Russian Microelectronics | 
| Volume | 52 | 
| Issue number | Suppl 1 | 
| DOIs | |
| Publication status | Published - Dec 2023 | 
ID: 59888075