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Materials surface smoothing to sub-nanometer level of roughness by argon cluster ion beam. / Korobeishchikov, N. G.; Nikolaev, I. V.; Roenko, M. A.

In: Journal of Physics: Conference Series, Vol. 927, No. 1, 012026, 23.11.2017.

Research output: Contribution to journal › Article › peer-review

Harvard

Korobeishchikov, NG, Nikolaev, IV & Roenko, MA 2017, 'Materials surface smoothing to sub-nanometer level of roughness by argon cluster ion beam', Journal of Physics: Conference Series, vol. 927, no. 1, 012026. https://doi.org/10.1088/1742-6596/927/1/012026

APA

Korobeishchikov, N. G., Nikolaev, I. V., & Roenko, M. A. (2017). Materials surface smoothing to sub-nanometer level of roughness by argon cluster ion beam. Journal of Physics: Conference Series, 927(1), [012026]. https://doi.org/10.1088/1742-6596/927/1/012026

Vancouver

Korobeishchikov NG, Nikolaev IV, Roenko MA. Materials surface smoothing to sub-nanometer level of roughness by argon cluster ion beam. Journal of Physics: Conference Series. 2017 Nov 23;927(1):012026. doi: 10.1088/1742-6596/927/1/012026

Author

Korobeishchikov, N. G. ; Nikolaev, I. V. ; Roenko, M. A. / Materials surface smoothing to sub-nanometer level of roughness by argon cluster ion beam. In: Journal of Physics: Conference Series. 2017 ; Vol. 927, No. 1.

BibTeX

@article{3f37eb34c27b47c087aadd5268925db8,
title = "Materials surface smoothing to sub-nanometer level of roughness by argon cluster ion beam",
abstract = "In this study, the influence of the accelerated argon cluster ion beam on the topography of stainless steel and optical glass surfaces has been investigated. The possibility of smoothing the material's surface to the sub-nanometer level of roughness is shown. The dose dependencies of the root-mean-square roughness and power spectral density function are obtained. It is demonstrated that by the cluster ion treatment the effective roughness decreases at different ranges of spatial frequencies. Anisotropic structure of the treated material effects on the obtained surface roughness.",
author = "Korobeishchikov, {N. G.} and Nikolaev, {I. V.} and Roenko, {M. A.}",
note = "Publisher Copyright: {\textcopyright} Published under licence by IOP Publishing Ltd.",
year = "2017",
month = nov,
day = "23",
doi = "10.1088/1742-6596/927/1/012026",
language = "English",
volume = "927",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "1",

}

RIS

TY - JOUR

T1 - Materials surface smoothing to sub-nanometer level of roughness by argon cluster ion beam

AU - Korobeishchikov, N. G.

AU - Nikolaev, I. V.

AU - Roenko, M. A.

N1 - Publisher Copyright: © Published under licence by IOP Publishing Ltd.

PY - 2017/11/23

Y1 - 2017/11/23

N2 - In this study, the influence of the accelerated argon cluster ion beam on the topography of stainless steel and optical glass surfaces has been investigated. The possibility of smoothing the material's surface to the sub-nanometer level of roughness is shown. The dose dependencies of the root-mean-square roughness and power spectral density function are obtained. It is demonstrated that by the cluster ion treatment the effective roughness decreases at different ranges of spatial frequencies. Anisotropic structure of the treated material effects on the obtained surface roughness.

AB - In this study, the influence of the accelerated argon cluster ion beam on the topography of stainless steel and optical glass surfaces has been investigated. The possibility of smoothing the material's surface to the sub-nanometer level of roughness is shown. The dose dependencies of the root-mean-square roughness and power spectral density function are obtained. It is demonstrated that by the cluster ion treatment the effective roughness decreases at different ranges of spatial frequencies. Anisotropic structure of the treated material effects on the obtained surface roughness.

UR - http://www.scopus.com/inward/record.url?scp=85037695321&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/927/1/012026

DO - 10.1088/1742-6596/927/1/012026

M3 - Article

AN - SCOPUS:85037695321

VL - 927

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012026

ER -

ID: 9087603