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Laser pulse shape dependence of poly-Si crystallization
Research output
:
Contribution to journal
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Article
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peer-review
Quantum Electronics Section
Overview
Cite this
DOI
https://doi.org/10.1063/1.4998221
Final published version
Oleg N. Prudnikov
Sung Tae Shin
Byoung Ho Cheong
Original language
English
Article number
125102
Number of pages
6
Journal
AIP Advances
Volume
7
Issue number
12
DOIs
https://doi.org/10.1063/1.4998221
Publication status
Published -
1 Dec 2017
OECD FOS+WOS
Research areas
THIN-FILM TRANSISTORS, AMORPHOUS-SILICON
ID: 9032235