TY - GEN

T1 - Laser beam diffraction inspection of periodic metal/oxide structures with infmicron period

AU - Belousov, Dmitrij A.

AU - Korolkov, Victor P.

AU - Khomutov, Vladimir N.

AU - Nasyrov, Ruslan K.

N1 - Funding Information: This work was supported by Russian Science Foundation (Grant 17-19-01721 “Development of super-resolution thermochemical laser technology for fabrication of computer-synthesized diffractive nanostructures”). In the research, we used the equipment of multiple-access center “High-resolution spectroscopy of gases and condensed matters” at IA&E SB RAS and Analytics and Technological Research Center "High Technology and Nanostructured Materials" at Novosibirsk state university. The authors would like to express their sincere gratitude to V.S. Terentiev for metal film sputtering and S.L. Mikerin for SEM images and useful discussion. Publisher Copyright: © 2019 SPIE. Copyright: Copyright 2019 Elsevier B.V., All rights reserved.

PY - 2019

Y1 - 2019

N2 - One of the promising methods for manufacturing high-aperture and inf-wavelength diffractive optical elements (DOE) is direct laser writing on thin metal films in regime of through oxidation. The amplitude diffractive metal/oxide structure is formed directly by localized laser heating without post-processing using liquid or dry etching. Optical diffractometry based on an analysis of the diffraction pattern obtained from a locally illuminated region of the grating is quite suitable indirect method for inspecting the metal/oxide gratings with a infmicron period. Measurement of the angular distribution of diffraction orders allows determining local period of the DOE structure, and measuring the intensity distribution over all diffraction orders allows determining the duty cycle of the grating. In this paper, the configurations of instrumentation schemes of metal/oxide gratings monitoring and algorithms for processing of diffraction patterns formed at illuminating the metal/oxide gratings by probe laser beam are considered.

AB - One of the promising methods for manufacturing high-aperture and inf-wavelength diffractive optical elements (DOE) is direct laser writing on thin metal films in regime of through oxidation. The amplitude diffractive metal/oxide structure is formed directly by localized laser heating without post-processing using liquid or dry etching. Optical diffractometry based on an analysis of the diffraction pattern obtained from a locally illuminated region of the grating is quite suitable indirect method for inspecting the metal/oxide gratings with a infmicron period. Measurement of the angular distribution of diffraction orders allows determining local period of the DOE structure, and measuring the intensity distribution over all diffraction orders allows determining the duty cycle of the grating. In this paper, the configurations of instrumentation schemes of metal/oxide gratings monitoring and algorithms for processing of diffraction patterns formed at illuminating the metal/oxide gratings by probe laser beam are considered.

KW - Characterization of periodic structures

KW - Diffraction optics

KW - Digital image processing

KW - Doe

KW - Metal/oxide gratings

UR - http://www.scopus.com/inward/record.url?scp=85073901110&partnerID=8YFLogxK

U2 - 10.1117/12.2520960

DO - 10.1117/12.2520960

M3 - Conference contribution

AN - SCOPUS:85073901110

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Holography

A2 - Fimia, Antonio

A2 - Hrabovsky, Miroslav

A2 - Sheridan, John T.

PB - SPIE

T2 - Holography: Advances and Modern Trends VI 2019

Y2 - 1 April 2019 through 4 April 2019

ER -