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Laser beam diffraction inspection of periodic metal/oxide structures with infmicron period

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

DOI

https://doi.org/10.1117/12.2520960
Final published version

Dmitrij A. Belousov
Victor P. Korolkov
Vladimir N. Khomutov
Ruslan K. Nasyrov

Original language	English
Title of host publication	Holography
Subtitle of host publication	Advances and Modern Trends VI
Editors	Antonio Fimia, Miroslav Hrabovsky, John T. Sheridan
Publisher	The International Society for Optical Engineering
ISBN (Electronic)	9781510627260
DOIs	https://doi.org/10.1117/12.2520960
Publication status	Published - 2019
Externally published	Yes
Event	Holography: Advances and Modern Trends VI 2019 - Prague, Czech Republic Duration: 1 Apr 2019 → 4 Apr 2019

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	11030
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Holography: Advances and Modern Trends VI 2019
Country/Territory	Czech Republic
City	Prague
Period	01.04.2019 → 04.04.2019

Research areas

Characterization of periodic structures, Diffraction optics, Digital image processing, Doe, Metal/oxide gratings

OECD FOS+WOS

1.03.SY OPTICS

ID: 28524994