Investigation of the properties of hydrogenated carbon films (a-C:H) deposited on germanium using a linear anode layer ion source

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Investigation of the properties of hydrogenated carbon films (a-C:H) deposited on germanium using a linear anode layer ion source. / Zolkin, Alexander; Semerikova, Anna; Chepkasov, Sergey et al.

In: Materials Today: Proceedings, Vol. 4, No. 11, 01.01.2017, p. 11500-11504.

Research output: Contribution to journal › Article › peer-review

BibTeX

@article{734e5f428fbc4599b43dcca653f8f77e,

title = "Investigation of the properties of hydrogenated carbon films (a-C:H) deposited on germanium using a linear anode layer ion source",

abstract = "Hydrogenated carbon films (a-C:H) were deposited on single-crystal Ge with ion beams by means of a linear anode layer ion source at a flow rate of C3H8 of 1.7-4.4 sccm. An intermediate layer formed by the ion beam with an energy of 3 keV increases the adhesion of the coatings to the substrate and increases the hardness of the coatings. The highest hardness obtained with the use of the intermediate layer was 19±1.9 GPa. The transmission of the germanium substrate coated with a single layer of the a-C:H coating reaches 65-67% at wavelengths of 4.5-6 μm.",

keywords = "a-C:H carbon films, adhesion, antireflective, diamond-like carbon, hardness, linear anode layer ion source, optical properties of a-C:H films, Raman spectroscopy, ENERGY, DIAMOND, DLC FILMS",

author = "Alexander Zolkin and Anna Semerikova and Sergey Chepkasov and Maxim Khomyakov",

note = "Publisher Copyright: {\textcopyright} 2017 Elsevier Ltd.",

year = "2017",

month = jan,

day = "1",

doi = "10.1016/j.matpr.2017.09.037",

language = "English",

volume = "4",

pages = "11500--11504",

journal = "Materials Today: Proceedings",

issn = "2214-7853",

publisher = "Elsevier Science B.V.",

number = "11",

}

RIS

TY - JOUR

T1 - Investigation of the properties of hydrogenated carbon films (a-C:H) deposited on germanium using a linear anode layer ion source

AU - Zolkin, Alexander

AU - Semerikova, Anna

AU - Chepkasov, Sergey

AU - Khomyakov, Maxim

PY - 2017/1/1

Y1 - 2017/1/1

N2 - Hydrogenated carbon films (a-C:H) were deposited on single-crystal Ge with ion beams by means of a linear anode layer ion source at a flow rate of C3H8 of 1.7-4.4 sccm. An intermediate layer formed by the ion beam with an energy of 3 keV increases the adhesion of the coatings to the substrate and increases the hardness of the coatings. The highest hardness obtained with the use of the intermediate layer was 19±1.9 GPa. The transmission of the germanium substrate coated with a single layer of the a-C:H coating reaches 65-67% at wavelengths of 4.5-6 μm.

AB - Hydrogenated carbon films (a-C:H) were deposited on single-crystal Ge with ion beams by means of a linear anode layer ion source at a flow rate of C3H8 of 1.7-4.4 sccm. An intermediate layer formed by the ion beam with an energy of 3 keV increases the adhesion of the coatings to the substrate and increases the hardness of the coatings. The highest hardness obtained with the use of the intermediate layer was 19±1.9 GPa. The transmission of the germanium substrate coated with a single layer of the a-C:H coating reaches 65-67% at wavelengths of 4.5-6 μm.

KW - a-C:H carbon films

KW - adhesion

KW - antireflective

KW - diamond-like carbon

KW - hardness

KW - linear anode layer ion source

KW - optical properties of a-C:H films

KW - Raman spectroscopy

KW - ENERGY

KW - DIAMOND

KW - DLC FILMS

UR - http://www.scopus.com/inward/record.url?scp=85031999569&partnerID=8YFLogxK

U2 - 10.1016/j.matpr.2017.09.037

DO - 10.1016/j.matpr.2017.09.037

M3 - Article

AN - SCOPUS:85031999569

VL - 4

SP - 11500

EP - 11504

JO - Materials Today: Proceedings

JF - Materials Today: Proceedings

SN - 2214-7853

IS - 11

ER -

ID: 9875874