Investigation of the properties of hydrogenated carbon films (a-C:H) deposited on germanium using a linear anode layer ion source

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	11500-11504
Number of pages	5
Journal	Materials Today: Proceedings
Volume	4
Issue number	11
DOIs	https://doi.org/10.1016/j.matpr.2017.09.037
Publication status	Published - 1 Jan 2017

a-C:H carbon films, adhesion, antireflective, diamond-like carbon, hardness, linear anode layer ion source, optical properties of a-C:H films, Raman spectroscopy, ENERGY, DIAMOND, DLC FILMS

ID: 9875874