Original languageEnglish
Pages (from-to)1088-1096
Number of pages9
JournalRussian Microelectronics
Volume54
Issue number8
DOIs
Publication statusPublished - Dec 2025

    Research areas

  • C–V, EB-PVD, I–V, MIS structures, germanosilicate glass films

    OECD FOS+WOS

  • 2.05 MATERIALS ENGINEERING

ID: 75917121