DOI

  • L. V. Baranova
  • V. I. Strunin
  • N. A. Chirikov
Original languageEnglish
Article number012023
JournalJournal of Physics: Conference Series
Volume1870
Issue number1
DOIs
Publication statusPublished - 19 Apr 2021
Event1st All-Russian Conference with International Participation on Gas Discharge Plasma and Synthesis of Nanostructures - Kazan, Russian Federation
Duration: 2 Dec 2020 → 5 Dec 2020
Conference number: 1

    Research areas

  • elemental composition, film surface morphology, magnetron sputtering, scanning electron microscopy

    OECD FOS+WOS

  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

ID: 28471328