Implementation of Terahertz High-Pass Filters Based on All-Metal Microstructures using Deep X-ray Lithography

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	115-125
Number of pages	11
Journal	Optoelectronics, Instrumentation and Data Processing
Volume	55
Issue number	2
DOIs	https://doi.org/10.3103/S875669901902002X
Publication status	Published - 1 Mar 2019

deep X-ray lithography, LIGA technology, microstructures, quasi-optical filters, terahertz range, SUBTERAHERTZ, TUNGSTEN

ID: 20588637