Hydrogen radical enhanced atomic layer deposition of TaOx

Hydrogen radical enhanced atomic layer deposition of TaO_x: saturation studies and methods for oxygen deficiency control

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	9667-9674
Number of pages	8
Journal	Journal of Materials Chemistry C
Volume	6
Issue number	36
DOIs	https://doi.org/10.1039/c8tc00679b
Publication status	Published - 28 Sept 2018

ID: 16703541