Original languageEnglish
Pages (from-to)876-890
Number of pages15
JournalPlasma Physics Reports
Volume43
Issue number8
DOIs
Publication statusPublished - 1 Aug 2017

    OECD FOS+WOS

    Research areas

  • ELECTRONEGATIVE RADIOFREQUENCY DISCHARGES, CAPACITIVELY COUPLED DISCHARGES, RF GLOW-DISCHARGES, CONTAINING PLASMAS, OPTICAL-EMISSION, GAS TEMPERATURE, DIAGNOSTICS, CL-2, DENSITIES, ION

ID: 12078580