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Getter Thin Films Pulsed Magnetron Sputtering in Narrow Aperture Vacuum Chambers of Synchrotron Radiation Source

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Accelerator Physics Section

DOI

https://doi.org/10.1109/EDM61683.2024.10614971
Final published version

Vyacheslav A. Kaygorodtsev
Alexander A. Krasnov

Original language	English
Title of host publication	International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM
Publisher	IEEE Computer Society
Pages	940-943
Number of pages	4
ISBN (Print)	9798350389234
DOIs	https://doi.org/10.1109/EDM61683.2024.10614971
Publication status	Published - 2024
Event	25th IEEE International Conference of Young Professionals in Electron Devices and Materials - Республика Алтай, Russian Federation Duration: 28 Jun 2024 → 2 Jul 2024 Conference number: 25 https://edm.ieeesiberia.org/

Publication series

Name	International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices, EDM

Conference

Conference	25th IEEE International Conference of Young Professionals in Electron Devices and Materials
Abbreviated title	EDM 2024
Country/Territory	Russian Federation
Period	28.06.2024 → 02.07.2024
Internet address	https://edm.ieeesiberia.org/

Research areas

SKIF, magnetron sputtering, pulsed sputtering, synchrotron radiation, thin films, vacuum chambers

OECD FOS+WOS

1.03 PHYSICAL SCIENCES AND ASTRONOMY

ID: 60548527