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Generation of accelerated cluster-ion beams for nanotechnology : 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. . / Korobeishchikov, N. G.; Zarvin, A. E.; Kalyada, V. V. et al.

2013. Paper presented at 21-th International Symposium on Plasma Chemistry (), Cairns, Queensland, Australia.

Research output: Contribution to conference › Paper › peer-review

Harvard

Korobeishchikov, NG, Zarvin, AE, Kalyada, VV & Shmakov, AA 2013, 'Generation of accelerated cluster-ion beams for nanotechnology: 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. ', Paper presented at 21-th International Symposium on Plasma Chemistry (), Cairns, Australia, 04.08.2013 - 09.08.2013. <http://www.ispc-conference.org/ispcproc/ispc21/ID166.pdf>

APA

Korobeishchikov, N. G., Zarvin, A. E., Kalyada, V. V., & Shmakov, A. A. (2013). Generation of accelerated cluster-ion beams for nanotechnology: 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. . Paper presented at 21-th International Symposium on Plasma Chemistry (), Cairns, Queensland, Australia. http://www.ispc-conference.org/ispcproc/ispc21/ID166.pdf

Vancouver

Korobeishchikov NG, Zarvin AE, Kalyada VV, Shmakov AA. Generation of accelerated cluster-ion beams for nanotechnology: 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. . 2013. Paper presented at 21-th International Symposium on Plasma Chemistry (), Cairns, Queensland, Australia.

Author

Korobeishchikov, N. G. ; Zarvin, A. E. ; Kalyada, V. V. et al. / Generation of accelerated cluster-ion beams for nanotechnology : 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. . Paper presented at 21-th International Symposium on Plasma Chemistry (), Cairns, Queensland, Australia.3 p.

BibTeX

@conference{014d66c9a1014ebe9374162c0abfa8d3,
title = "Generation of accelerated cluster-ion beams for nanotechnology: 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. ",
abstract = "Formation of keV-energy Ar cluster ion beam is studied. Optimum condition forformation high intensity cluster beam with 2*1016 clusters/sm2*sec investigated both experimentally and by numerical simulation. The mass distributions of the accelerated cluster ion beam were measured. It has been demonstrated that mass spectrum of cluster ion depend of collision processes between the ions during the formation.",
author = "Korobeishchikov, {N. G.} and Zarvin, {A. E.} and Kalyada, {V. V.} and Shmakov, {A. A.}",
year = "2013",
language = "English",
note = "21-th International Symposium on Plasma Chemistry (), ISPC 21 ; Conference date: 04-08-2013 Through 09-08-2013",

}

RIS

TY - CONF

T1 - Generation of accelerated cluster-ion beams for nanotechnology

T2 - 21-th International Symposium on Plasma Chemistry ()

AU - Korobeishchikov, N. G.

AU - Zarvin, A. E.

AU - Kalyada, V. V.

AU - Shmakov, A. A.

N1 - Conference code: 21

PY - 2013

Y1 - 2013

N2 - Formation of keV-energy Ar cluster ion beam is studied. Optimum condition forformation high intensity cluster beam with 2*1016 clusters/sm2*sec investigated both experimentally and by numerical simulation. The mass distributions of the accelerated cluster ion beam were measured. It has been demonstrated that mass spectrum of cluster ion depend of collision processes between the ions during the formation.

AB - Formation of keV-energy Ar cluster ion beam is studied. Optimum condition forformation high intensity cluster beam with 2*1016 clusters/sm2*sec investigated both experimentally and by numerical simulation. The mass distributions of the accelerated cluster ion beam were measured. It has been demonstrated that mass spectrum of cluster ion depend of collision processes between the ions during the formation.

M3 - Paper

Y2 - 4 August 2013 through 9 August 2013

ER -

ID: 27283505