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Generation of accelerated cluster-ion beams for nanotechnology : 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. . / Korobeishchikov, N. G.; Zarvin, A. E.; Kalyada, V. V. et al.

2013.

Research output: Contribution to conference › Paper › peer-review

Harvard

Korobeishchikov, NG, Zarvin, AE, Kalyada, VV & Shmakov, AA 2013, 'Generation of accelerated cluster-ion beams for nanotechnology: 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. '. <http://www.ispc-conference.org/ispcproc/ispc21/ID166.pdf>

APA

Korobeishchikov, N. G., Zarvin, A. E., Kalyada, V. V., & Shmakov, A. A. (2013). Generation of accelerated cluster-ion beams for nanotechnology: 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. . http://www.ispc-conference.org/ispcproc/ispc21/ID166.pdf

Vancouver

Korobeishchikov NG, Zarvin AE, Kalyada VV, Shmakov AA. Generation of accelerated cluster-ion beams for nanotechnology: 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. . 2013.

Author

Korobeishchikov, N. G. ; Zarvin, A. E. ; Kalyada, V. V. et al. / Generation of accelerated cluster-ion beams for nanotechnology : 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. . 3 p.

BibTeX

@conference{014d66c9a1014ebe9374162c0abfa8d3,
title = "Generation of accelerated cluster-ion beams for nanotechnology: 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings. ",
abstract = "Formation of keV-energy Ar cluster ion beam is studied. Optimum condition forformation high intensity cluster beam with 2*1016 clusters/sm2*sec investigated both experimentally and by numerical simulation. The mass distributions of the accelerated cluster ion beam were measured. It has been demonstrated that mass spectrum of cluster ion depend of collision processes between the ions during the formation.",
author = "Korobeishchikov, {N. G.} and Zarvin, {A. E.} and Kalyada, {V. V.} and Shmakov, {A. A.}",
year = "2013",
language = "English",

}

RIS

TY - CONF

T1 - Generation of accelerated cluster-ion beams for nanotechnology

T2 - 21-th International Symposium on Plasma Chemistry (ISPC 21). 4 – 9 August 2013. Cairns, Australia. Proceedings.

AU - Korobeishchikov, N. G.

AU - Zarvin, A. E.

AU - Kalyada, V. V.

AU - Shmakov, A. A.

PY - 2013

Y1 - 2013

N2 - Formation of keV-energy Ar cluster ion beam is studied. Optimum condition forformation high intensity cluster beam with 2*1016 clusters/sm2*sec investigated both experimentally and by numerical simulation. The mass distributions of the accelerated cluster ion beam were measured. It has been demonstrated that mass spectrum of cluster ion depend of collision processes between the ions during the formation.

AB - Formation of keV-energy Ar cluster ion beam is studied. Optimum condition forformation high intensity cluster beam with 2*1016 clusters/sm2*sec investigated both experimentally and by numerical simulation. The mass distributions of the accelerated cluster ion beam were measured. It has been demonstrated that mass spectrum of cluster ion depend of collision processes between the ions during the formation.

M3 - Paper

ER -

ID: 27283505