DOI

Original languageEnglish
Title of host publication12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011 - Proceedings
Pages119-121
Number of pages3
DOIs
Publication statusPublished - 2011
Externally publishedYes
Event12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011 - Erlagol, Altai, Russian Federation
Duration: 30 Jun 20114 Jul 2011

Publication series

Name12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011 - Proceedings

Conference

Conference12th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices, EDM'2011
Country/TerritoryRussian Federation
CityErlagol, Altai
Period30.06.201104.07.2011

    OECD FOS+WOS

  • 1.03 PHYSICAL SCIENCES AND ASTRONOMY

    Research areas

  • lithography, Photonic crystal, Proximity effect

ID: 25602383