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Formation of an ion-cluster beam for material processing. / Korobeishchikov, N. G.; Zarvin, A. E.; Kalyada, V. V. et al.

In: Journal of International Scientific Publications, Vol. 6, No. 2, 2012, p. 115-123.

Research output: Contribution to journal › Article › peer-review

Harvard

Korobeishchikov, NG, Zarvin, AE, Kalyada, VV & Khodakov, MD 2012, 'Formation of an ion-cluster beam for material processing', Journal of International Scientific Publications, vol. 6, no. 2, pp. 115-123. <https://www.scientific-publications.net/download/materials-methods-and-technologies-2012-2.pdf>

APA

Korobeishchikov, N. G., Zarvin, A. E., Kalyada, V. V., & Khodakov, M. D. (2012). Formation of an ion-cluster beam for material processing. Journal of International Scientific Publications, 6(2), 115-123. https://www.scientific-publications.net/download/materials-methods-and-technologies-2012-2.pdf

Vancouver

Korobeishchikov NG, Zarvin AE, Kalyada VV, Khodakov MD. Formation of an ion-cluster beam for material processing. Journal of International Scientific Publications. 2012;6(2):115-123.

Author

Korobeishchikov, N. G. ; Zarvin, A. E. ; Kalyada, V. V. et al. / Formation of an ion-cluster beam for material processing. In: Journal of International Scientific Publications. 2012 ; Vol. 6, No. 2. pp. 115-123.

BibTeX

@article{9e6cbac1e3164ca092561108bfad69a0,
title = "Formation of an ion-cluster beam for material processing",
abstract = "In this paper the possibility of accelerating gaseous cluster-ion beams for nanomaterials processing are discussed. In order to realize surface processing technology, a high-energy gas cluster ion beam irradiation system was developed. The results of the experimental study of formation of an intense cluster-ion beam of argon and nitrogen are presented. The fundamental phenomenon influences on the main parameters of cluster-ion beam (cluster-ion size, energy, at al.) are considered.",
author = "Korobeishchikov, {N. G.} and Zarvin, {A. E.} and Kalyada, {V. V.} and Khodakov, {M. D.}",
year = "2012",
language = "English",
volume = "6",
pages = "115--123",
journal = "Journal of International Scientific Publications",
issn = "1314-7269",
number = "2",

}

RIS

TY - JOUR

T1 - Formation of an ion-cluster beam for material processing

AU - Korobeishchikov, N. G.

AU - Zarvin, A. E.

AU - Kalyada, V. V.

AU - Khodakov, M. D.

PY - 2012

Y1 - 2012

N2 - In this paper the possibility of accelerating gaseous cluster-ion beams for nanomaterials processing are discussed. In order to realize surface processing technology, a high-energy gas cluster ion beam irradiation system was developed. The results of the experimental study of formation of an intense cluster-ion beam of argon and nitrogen are presented. The fundamental phenomenon influences on the main parameters of cluster-ion beam (cluster-ion size, energy, at al.) are considered.

AB - In this paper the possibility of accelerating gaseous cluster-ion beams for nanomaterials processing are discussed. In order to realize surface processing technology, a high-energy gas cluster ion beam irradiation system was developed. The results of the experimental study of formation of an intense cluster-ion beam of argon and nitrogen are presented. The fundamental phenomenon influences on the main parameters of cluster-ion beam (cluster-ion size, energy, at al.) are considered.

M3 - Article

VL - 6

SP - 115

EP - 123

JO - Journal of International Scientific Publications

JF - Journal of International Scientific Publications

SN - 1314-7269

IS - 2

ER -

ID: 27282652