Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Original language | English |
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Title of host publication | Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII |
Editors | B Neuenschwander, CP Grigoropoulos, T Makimura, G Raciukaitis |
Publisher | SPIE |
Number of pages | 6 |
Volume | 10091 |
ISBN (Electronic) | 9781510606234 |
ISBN (Print) | 978-1-5106-0623-4 |
DOIs | |
Publication status | Published - 1 Jan 2017 |
Event | Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII 2017 - San Francisco, United States Duration: 30 Jan 2017 → 2 Feb 2017 |
Name | Proceedings of SPIE |
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Publisher | SPIE-INT SOC OPTICAL ENGINEERING |
Volume | 10091 |
ISSN (Print) | 0277-786X |
Conference | Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXII 2017 |
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Country/Territory | United States |
City | San Francisco |
Period | 30.01.2017 → 02.02.2017 |
ID: 10187695