Research output: Contribution to journal › Conference article › peer-review
| Original language | English |
|---|---|
| Article number | 012086 |
| Number of pages | 5 |
| Journal | IOP Conference Series: Materials Science and Engineering |
| Volume | 387 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 17 Jul 2018 |
| Event | 25th International Conference on Vacuum Technique and Technology - St. Petersburg, Russian Federation Duration: 5 Jun 2018 → 7 Jun 2018 |
ID: 16071849