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Features of formation of gas cluster ion beams. / Korobeishchikov, N. G.; Kalyada, V. V.; Skovorodko, P. A. et al.

In: Vacuum, Vol. 119, 15.06.2015, p. 256-263.

Research output: Contribution to journal › Article › peer-review

Harvard

Korobeishchikov, NG, Kalyada, VV, Skovorodko, PA, Shmakov, AA, Khodakov, MD, Shulzhenko, GI, Voskoboynikov, RV & Zarvin, AE 2015, 'Features of formation of gas cluster ion beams', Vacuum, vol. 119, pp. 256-263. https://doi.org/10.1016/j.vacuum.2015.05.039

APA

Korobeishchikov, N. G., Kalyada, V. V., Skovorodko, P. A., Shmakov, A. A., Khodakov, M. D., Shulzhenko, G. I., Voskoboynikov, R. V., & Zarvin, A. E. (2015). Features of formation of gas cluster ion beams. Vacuum, 119, 256-263. https://doi.org/10.1016/j.vacuum.2015.05.039

Vancouver

Korobeishchikov NG, Kalyada VV, Skovorodko PA, Shmakov AA, Khodakov MD, Shulzhenko GI et al. Features of formation of gas cluster ion beams. Vacuum. 2015 Jun 15;119:256-263. doi: 10.1016/j.vacuum.2015.05.039

Author

Korobeishchikov, N. G. ; Kalyada, V. V. ; Skovorodko, P. A. et al. / Features of formation of gas cluster ion beams. In: Vacuum. 2015 ; Vol. 119. pp. 256-263.

BibTeX

@article{a5c0fc47f5b74abf8eb4a7bd3c02906a,
title = "Features of formation of gas cluster ion beams",
abstract = "Results of experimental study of the formation of intensive gas cluster ion beams are presented. New applicable experimental equipment is described. The peculiarities of the formation and diagnostics of intensive cluster ion beams are discussed. Optimum conditions for forming the flow of neutral argon clusters beam with an intensity of up to 1015 cluster/(cm2·s) have been determined. It has been demonstrated that the increase in cluster beam intensity is limited by conservatism of the condensation process in supersonic gas jet. The available equipment allows one the formation of cluster ion beams with mean size of 103 atoms/cluster, energy of up to 25 keV and intensity of up to 5·1013 ions/(cm2·s). Mass composition of an accelerated cluster beam has been analysed by time-of-flight mass spectrometry. The numerical model for the parameters of the cluster beam is developed and found to predict the results which are in satisfactory agreement with the measured data.",
keywords = "Cluster, Cluster ion beam, Condensation, Free jet, Mass spectrometry, Simulation",
author = "Korobeishchikov, {N. G.} and Kalyada, {V. V.} and Skovorodko, {P. A.} and Shmakov, {A. A.} and Khodakov, {M. D.} and Shulzhenko, {G. I.} and Voskoboynikov, {R. V.} and Zarvin, {A. E.}",
note = "Funding Information: This study was supported by grant of the Ministry of Education and Science of the Russian Federation (No. 2292 , NSU) and by grant from the Russian Government (project No. 14.Z50.31.0019 ). Publisher Copyright: {\textcopyright} 2015 Elsevier Ltd. All rights reserved. Copyright: Copyright 2018 Elsevier B.V., All rights reserved.",
year = "2015",
month = jun,
day = "15",
doi = "10.1016/j.vacuum.2015.05.039",
language = "English",
volume = "119",
pages = "256--263",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier Ltd",

}

RIS

TY - JOUR

T1 - Features of formation of gas cluster ion beams

AU - Korobeishchikov, N. G.

AU - Kalyada, V. V.

AU - Skovorodko, P. A.

AU - Shmakov, A. A.

AU - Khodakov, M. D.

AU - Shulzhenko, G. I.

AU - Voskoboynikov, R. V.

AU - Zarvin, A. E.

N1 - Funding Information: This study was supported by grant of the Ministry of Education and Science of the Russian Federation (No. 2292 , NSU) and by grant from the Russian Government (project No. 14.Z50.31.0019 ). Publisher Copyright: © 2015 Elsevier Ltd. All rights reserved. Copyright: Copyright 2018 Elsevier B.V., All rights reserved.

PY - 2015/6/15

Y1 - 2015/6/15

N2 - Results of experimental study of the formation of intensive gas cluster ion beams are presented. New applicable experimental equipment is described. The peculiarities of the formation and diagnostics of intensive cluster ion beams are discussed. Optimum conditions for forming the flow of neutral argon clusters beam with an intensity of up to 1015 cluster/(cm2·s) have been determined. It has been demonstrated that the increase in cluster beam intensity is limited by conservatism of the condensation process in supersonic gas jet. The available equipment allows one the formation of cluster ion beams with mean size of 103 atoms/cluster, energy of up to 25 keV and intensity of up to 5·1013 ions/(cm2·s). Mass composition of an accelerated cluster beam has been analysed by time-of-flight mass spectrometry. The numerical model for the parameters of the cluster beam is developed and found to predict the results which are in satisfactory agreement with the measured data.

AB - Results of experimental study of the formation of intensive gas cluster ion beams are presented. New applicable experimental equipment is described. The peculiarities of the formation and diagnostics of intensive cluster ion beams are discussed. Optimum conditions for forming the flow of neutral argon clusters beam with an intensity of up to 1015 cluster/(cm2·s) have been determined. It has been demonstrated that the increase in cluster beam intensity is limited by conservatism of the condensation process in supersonic gas jet. The available equipment allows one the formation of cluster ion beams with mean size of 103 atoms/cluster, energy of up to 25 keV and intensity of up to 5·1013 ions/(cm2·s). Mass composition of an accelerated cluster beam has been analysed by time-of-flight mass spectrometry. The numerical model for the parameters of the cluster beam is developed and found to predict the results which are in satisfactory agreement with the measured data.

KW - Cluster

KW - Cluster ion beam

KW - Condensation

KW - Free jet

KW - Mass spectrometry

KW - Simulation

UR - http://www.scopus.com/inward/record.url?scp=84931287879&partnerID=8YFLogxK

U2 - 10.1016/j.vacuum.2015.05.039

DO - 10.1016/j.vacuum.2015.05.039

M3 - Article

AN - SCOPUS:84931287879

VL - 119

SP - 256

EP - 263

JO - Vacuum

JF - Vacuum

SN - 0042-207X

ER -

ID: 27326360