Fabrication of quasi-optical selective elements for the terahertz range in the form of pseudometallic structures via deep X-ray lithography

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Fabrication of quasi-optical selective elements for the terahertz range in the form of pseudometallic structures via deep X-ray lithography. / Gentselev, A. N.; Kuznetsov, S. A.; Baev, S. G. et al.

In: Journal of Surface Investigation, Vol. 11, No. 4, 01.07.2017, p. 710-720.

Research output: Contribution to journal › Article › peer-review

BibTeX

@article{aea5852c94074a4e8004f72d8e9a8152,

title = "Fabrication of quasi-optical selective elements for the terahertz range in the form of pseudometallic structures via deep X-ray lithography",

abstract = "A technique for fabricating self-bearing pseudometallic structures, which hold promise for utilization as quasi-optical frequency-selective elements in the terahertz range of the electromagnetic spectrum, is discussed. The technique is based on microstructuring a continuous dielectric layer via stencilled X-ray lithography involving synchrotron radiation with subsequent metallization of the entire structure surface. The main manufacturing schemes are described, including fabrication of the initial substrates and X-ray masks. Examples of samples of the produced selective elements, such as frequency filters and flat lenses, as well as their operating characteristics, are presented.",

keywords = "deep X-ray lithography, high-pass filter, laser microtreatment (cutting), planar lens, pseudometallic structure, synchrotron radiation, terahertz radiation, X-ray mask",

author = "Gentselev, {A. N.} and Kuznetsov, {S. A.} and Baev, {S. G.} and Goldenberg, {B. G.} and Lonshakov, {E. A.}",

note = "Publisher Copyright: {\textcopyright} 2017, Pleiades Publishing, Ltd.",

year = "2017",

month = jul,

day = "1",

doi = "10.1134/S1027451017040073",

language = "English",

volume = "11",

pages = "710--720",

journal = "Journal of Surface Investigation",

issn = "1027-4510",

publisher = "Maik Nauka Publishing / Springer SBM",

number = "4",

}

RIS

TY - JOUR

T1 - Fabrication of quasi-optical selective elements for the terahertz range in the form of pseudometallic structures via deep X-ray lithography

AU - Gentselev, A. N.

AU - Kuznetsov, S. A.

AU - Baev, S. G.

AU - Goldenberg, B. G.

AU - Lonshakov, E. A.

PY - 2017/7/1

Y1 - 2017/7/1

N2 - A technique for fabricating self-bearing pseudometallic structures, which hold promise for utilization as quasi-optical frequency-selective elements in the terahertz range of the electromagnetic spectrum, is discussed. The technique is based on microstructuring a continuous dielectric layer via stencilled X-ray lithography involving synchrotron radiation with subsequent metallization of the entire structure surface. The main manufacturing schemes are described, including fabrication of the initial substrates and X-ray masks. Examples of samples of the produced selective elements, such as frequency filters and flat lenses, as well as their operating characteristics, are presented.

AB - A technique for fabricating self-bearing pseudometallic structures, which hold promise for utilization as quasi-optical frequency-selective elements in the terahertz range of the electromagnetic spectrum, is discussed. The technique is based on microstructuring a continuous dielectric layer via stencilled X-ray lithography involving synchrotron radiation with subsequent metallization of the entire structure surface. The main manufacturing schemes are described, including fabrication of the initial substrates and X-ray masks. Examples of samples of the produced selective elements, such as frequency filters and flat lenses, as well as their operating characteristics, are presented.

KW - deep X-ray lithography

KW - high-pass filter

KW - laser microtreatment (cutting)

KW - planar lens

KW - pseudometallic structure

KW - synchrotron radiation

KW - terahertz radiation

KW - X-ray mask

UR - http://www.scopus.com/inward/record.url?scp=85028038211&partnerID=8YFLogxK

U2 - 10.1134/S1027451017040073

DO - 10.1134/S1027451017040073

M3 - Article

AN - SCOPUS:85028038211

VL - 11

SP - 710

EP - 720

JO - Journal of Surface Investigation

JF - Journal of Surface Investigation

SN - 1027-4510

IS - 4

ER -

ID: 8679039