Fabrication of quasi-optical selective elements for the terahertz range in the form of pseudometallic structures via deep X-ray lithography

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	710-720
Number of pages	11
Journal	Journal of Surface Investigation
Volume	11
Issue number	4
DOIs	https://doi.org/10.1134/S1027451017040073
Publication status	Published - 1 Jul 2017

deep X-ray lithography, high-pass filter, laser microtreatment (cutting), planar lens, pseudometallic structure, synchrotron radiation, terahertz radiation, X-ray mask

ID: 8679039