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Evolution of the atomic and electronic structures during nitridation of the Si(1 1 1) surface under ammonia flux

Research output: Contribution to journal › Article › peer-review

Лаборатория полупроводниковых и диэлектрических материалов ФФ

DOI

https://doi.org/10.1016/j.apsusc.2021.151276
Final published version

Vladimir Mansurov
Yury Galitsyn
Timur Malin
Sergey Teys
Denis Milakhin
Konstantin Zhuravlev

Original language	English
Article number	151276
Journal	Applied Surface Science
Volume	571
DOIs	https://doi.org/10.1016/j.apsusc.2021.151276
Publication status	Published - 1 Jan 2022

OECD FOS+WOS

2.05 MATERIALS ENGINEERING
1.03 PHYSICAL SCIENCES AND ASTRONOMY
1.04 CHEMICAL SCIENCES

Research areas

Aromaticity, Graphene-like materials, Morphology by STM, Silicon nitridation, Silicon nitride, π-bonds

ID: 35263139