Evolution of Micropits on Large Terraces of the Si(111) Surface during High-Temperature Annealing › Research Explorer

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Evolution of Micropits on Large Terraces of the Si(111) Surface during High-Temperature Annealing

Research output: Contribution to journal › Article › peer-review

Semiconductor Physics Section

DOI

https://doi.org/10.1134/S1063782619040237
Final published version

A. S. Petrov
S. V. Sitnikov
S. S. Kosolobov
A. V. Latyshev

Original language	English
Pages (from-to)	434-438
Number of pages	5
Journal	Semiconductors
Volume	53
Issue number	4
DOIs	https://doi.org/10.1134/S1063782619040237
Publication status	Published - 1 Apr 2019

OECD FOS+WOS

Research areas

ATOMIC STEPS, KINETICS, NUCLEATION, MICROSCOPY, PHASE

ID: 20163340