Electrohydrodynamic emitters of ion beams. / Mazarov, P.; Dudnikov, V. G.; Tolstoguzov, A. B.
In: Physics-Uspekhi, Vol. 63, No. 12, 12.2020, p. 1219-1255.Research output: Contribution to journal › Article › peer-review
}
TY - JOUR
T1 - Electrohydrodynamic emitters of ion beams
AU - Mazarov, P.
AU - Dudnikov, V. G.
AU - Tolstoguzov, A. B.
N1 - Publisher Copyright: © 2020 Uspekhi Fizicheskikh Nauk. All rights reserved. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2020/12
Y1 - 2020/12
N2 - We discuss physical processes underlying the generation of ion beams with high emission current density in electrohydrodynamic (EHD) emitters based on liquid metals and alloys and with room temperature ionic liquids. We consider EHD effects that influence the emission of ions (ion production mechanisms) and the kinetics of ion interactions in high-density beams. We analyze the factors determining the emission zone size, sustainability of emission at high and low currents, generation of clusters, increase in energy spread, decrease in brightness, and other features of ion beams. We consider the specific design features of EHD emitters and the problems of practically ensuring their stable operation. Discussed in detail are modern application areas for ion sources with EHD emitters, including technological installations for ion beam lithography, micro- and nanopatterning, ion microscopes and tools for local mass spectrometry of secondary ions, and systems to control and neutralize the potential of spacecraft as well as electrostatic rocket engines (microthrusters). We analyze prospects for further development of EHD emitters themselves and instruments based on them.
AB - We discuss physical processes underlying the generation of ion beams with high emission current density in electrohydrodynamic (EHD) emitters based on liquid metals and alloys and with room temperature ionic liquids. We consider EHD effects that influence the emission of ions (ion production mechanisms) and the kinetics of ion interactions in high-density beams. We analyze the factors determining the emission zone size, sustainability of emission at high and low currents, generation of clusters, increase in energy spread, decrease in brightness, and other features of ion beams. We consider the specific design features of EHD emitters and the problems of practically ensuring their stable operation. Discussed in detail are modern application areas for ion sources with EHD emitters, including technological installations for ion beam lithography, micro- and nanopatterning, ion microscopes and tools for local mass spectrometry of secondary ions, and systems to control and neutralize the potential of spacecraft as well as electrostatic rocket engines (microthrusters). We analyze prospects for further development of EHD emitters themselves and instruments based on them.
KW - electrodynamics
KW - liquid metal ion source
KW - room temperature ionic liquid
KW - nanopatterning
KW - secondary ion mass spectrometry
KW - ion beam lithography
KW - liquid metals and alloys
KW - nanotechnology
KW - CURRENT-DENSITY PROFILES
KW - DIRECT FIELD-EVAPORATION
KW - TEM SAMPLE PREPARATION
KW - CURRENT-VOLTAGE CURVES
KW - LIQUID-METAL SOURCES
KW - DOUBLY-CHARGED IONS
KW - VIRTUAL SOURCE SIZE
KW - MASS-SPECTROMETRY
KW - ELECTRON-EMISSION
KW - TEMPERATURE-DEPENDENCE
KW - Liquid metals and alloys
KW - Ion beam lithography
KW - Nanopatterning
KW - Liquid metal ion source
KW - Electrodynamics
KW - Secondary ion mass spectrometry
KW - Room temperature ionic liquid
KW - Nanotechnology
UR - http://www.scopus.com/inward/record.url?scp=85102730097&partnerID=8YFLogxK
U2 - 10.3367/UFNe.2020.09.038845
DO - 10.3367/UFNe.2020.09.038845
M3 - Article
VL - 63
SP - 1219
EP - 1255
JO - Physics-Uspekhi
JF - Physics-Uspekhi
SN - 1063-7869
IS - 12
ER -
ID: 28014256