Research output: Contribution to journal › Article › peer-review
| Original language | English |
|---|---|
| Article number | 063404 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 40 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1 Dec 2022 |
ID: 39473178