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Dispersion of the refractive index in high-k dielectrics. / Shvets, V. A.; Kruchinin, V. N.; Gritsenko, V. A.

In: Optics and Spectroscopy (English translation of Optika i Spektroskopiya), Vol. 123, No. 5, 01.11.2017, p. 728-732.

Research output: Contribution to journal › Article › peer-review

Harvard

Shvets, VA, Kruchinin, VN & Gritsenko, VA 2017, 'Dispersion of the refractive index in high-k dielectrics', Optics and Spectroscopy (English translation of Optika i Spektroskopiya), vol. 123, no. 5, pp. 728-732. https://doi.org/10.1134/S0030400X17110194

APA

Shvets, V. A., Kruchinin, V. N., & Gritsenko, V. A. (2017). Dispersion of the refractive index in high-k dielectrics. Optics and Spectroscopy (English translation of Optika i Spektroskopiya), 123(5), 728-732. https://doi.org/10.1134/S0030400X17110194

Vancouver

Shvets VA, Kruchinin VN, Gritsenko VA. Dispersion of the refractive index in high-k dielectrics. Optics and Spectroscopy (English translation of Optika i Spektroskopiya). 2017 Nov 1;123(5):728-732. doi: 10.1134/S0030400X17110194

Author

Shvets, V. A. ; Kruchinin, V. N. ; Gritsenko, V. A. / Dispersion of the refractive index in high-k dielectrics. In: Optics and Spectroscopy (English translation of Optika i Spektroskopiya). 2017 ; Vol. 123, No. 5. pp. 728-732.

BibTeX

@article{bb7bc642d05441d28a55c8baecdf9f09,
title = "Dispersion of the refractive index in high-k dielectrics",
abstract = "A brief review of the optical properties of oxide materials that are used at present as dielectrics in modern microelectronics is presented. Using spectral ellipsometry, dispersion dependencies for different materials are measured. A brief comparative analysis of different dielectric coatings is carried out. The results of our research will be useful in further studies of the properties of dielectrics, as well as in technologies that are employed in the development of new semiconductor instruments and devices.",
author = "Shvets, {V. A.} and Kruchinin, {V. N.} and Gritsenko, {V. A.}",
year = "2017",
month = nov,
day = "1",
doi = "10.1134/S0030400X17110194",
language = "English",
volume = "123",
pages = "728--732",
journal = "Optics and Spectroscopy (English translation of Optika i Spektroskopiya)",
issn = "0030-400X",
publisher = "Maik Nauka Publishing / Springer SBM",
number = "5",

}

RIS

TY - JOUR

T1 - Dispersion of the refractive index in high-k dielectrics

AU - Shvets, V. A.

AU - Kruchinin, V. N.

AU - Gritsenko, V. A.

PY - 2017/11/1

Y1 - 2017/11/1

N2 - A brief review of the optical properties of oxide materials that are used at present as dielectrics in modern microelectronics is presented. Using spectral ellipsometry, dispersion dependencies for different materials are measured. A brief comparative analysis of different dielectric coatings is carried out. The results of our research will be useful in further studies of the properties of dielectrics, as well as in technologies that are employed in the development of new semiconductor instruments and devices.

AB - A brief review of the optical properties of oxide materials that are used at present as dielectrics in modern microelectronics is presented. Using spectral ellipsometry, dispersion dependencies for different materials are measured. A brief comparative analysis of different dielectric coatings is carried out. The results of our research will be useful in further studies of the properties of dielectrics, as well as in technologies that are employed in the development of new semiconductor instruments and devices.

UR - http://www.scopus.com/inward/record.url?scp=85034846577&partnerID=8YFLogxK

U2 - 10.1134/S0030400X17110194

DO - 10.1134/S0030400X17110194

M3 - Article

AN - SCOPUS:85034846577

VL - 123

SP - 728

EP - 732

JO - Optics and Spectroscopy (English translation of Optika i Spektroskopiya)

JF - Optics and Spectroscopy (English translation of Optika i Spektroskopiya)

SN - 0030-400X

IS - 5

ER -

ID: 9672658