• I. E. Tyschenko
  • A. G. Cherkov
Original languageEnglish
Pages (from-to)1364-1369
Number of pages6
JournalSemiconductors
Volume51
Issue number10
DOIs
Publication statusPublished - 1 Oct 2017

    OECD FOS+WOS

    Research areas

  • GERMANIUM, SILICON, FILMS, SIO2

ID: 12949280