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Crystallization of optically thick amorphous silicon films by near-ir femtosecond laser processing. / Mitsai, Eugeny; Dostovalov, Alexander; Bronnikov, Kirill et al.
Physics and Technology of Nanostructured Materials V - Selected full text papers from the 5th Asian School-Conference on Physics and Technology of Nanostructured Materials, ASCO-Nanomat 2020. ed. / Nikolay Gennadievich Galkin. Trans Tech Publications Ltd, 2020. p. 134-139 (Solid State Phenomena; Vol. 312 SSP).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Harvard
Mitsai, E, Dostovalov, A, Bronnikov, K, Nepomniaschiy, A, Zhizhchenko, A & Kuchmizhak, A 2020,
Crystallization of optically thick amorphous silicon films by near-ir femtosecond laser processing. in NG Galkin (ed.),
Physics and Technology of Nanostructured Materials V - Selected full text papers from the 5th Asian School-Conference on Physics and Technology of Nanostructured Materials, ASCO-Nanomat 2020. Solid State Phenomena, vol. 312 SSP, Trans Tech Publications Ltd, pp. 134-139, 5th Asian School-Conference on Physics and Technology of Nanostructured Materials, ASCO-Nanomat 2020, Vladivostok, Russian Federation,
30.07.2020.
https://doi.org/10.4028/www.scientific.net/SSP.312.134APA
Mitsai, E., Dostovalov, A., Bronnikov, K., Nepomniaschiy, A., Zhizhchenko, A., & Kuchmizhak, A. (2020).
Crystallization of optically thick amorphous silicon films by near-ir femtosecond laser processing. In N. G. Galkin (Ed.),
Physics and Technology of Nanostructured Materials V - Selected full text papers from the 5th Asian School-Conference on Physics and Technology of Nanostructured Materials, ASCO-Nanomat 2020 (pp. 134-139). (Solid State Phenomena; Vol. 312 SSP). Trans Tech Publications Ltd.
https://doi.org/10.4028/www.scientific.net/SSP.312.134Vancouver
Mitsai E, Dostovalov A, Bronnikov K, Nepomniaschiy A, Zhizhchenko A, Kuchmizhak A.
Crystallization of optically thick amorphous silicon films by near-ir femtosecond laser processing. In Galkin NG, editor, Physics and Technology of Nanostructured Materials V - Selected full text papers from the 5th Asian School-Conference on Physics and Technology of Nanostructured Materials, ASCO-Nanomat 2020. Trans Tech Publications Ltd. 2020. p. 134-139. (Solid State Phenomena). doi: 10.4028/www.scientific.net/SSP.312.134
Author
BibTeX
@inproceedings{6843fe50995141f0b49b9587b79ade12,
title = "Crystallization of optically thick amorphous silicon films by near-ir femtosecond laser processing",
abstract = "We demonstrated efficient crystallization of amorphous Si films induced by their direct irradiation with near-IR femtosecond laser pulses coming at sub-MHz repetition rate. Comprehensive analysis of morphology and composition of the laser-annealed film by atomic-force microscopy, Fourier-transform IR, Raman and energy dispersive X-ray spectroscopy as well as numerical modeling of optical spectra confirmed efficient crystallization of amorphous Si and high-quality of the obtained films opening pathway for applications in thin-film solar cells, transistors and displays.",
keywords = "Amorphous silicon, Femtosecond laser pulses, FTIR spectroscopy, Laser-induced annealing, Polycrystalline silicon, Raman spectroscopy, Thin films",
author = "Eugeny Mitsai and Alexander Dostovalov and Kirill Bronnikov and Alexander Nepomniaschiy and Alexey Zhizhchenko and Aleksandr Kuchmizhak",
note = "Funding Information: This work was supported by the Russian Science Foundation (Grant no. 18-79-10091) and Russian Foundation for Basic Research (project no. 19-32-90235). Publisher Copyright: {\textcopyright} 2020 Trans Tech Publications Ltd, Switzerland. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 5th Asian School-Conference on Physics and Technology of Nanostructured Materials, ASCO-Nanomat 2020 ; Conference date: 30-07-2020 Through 03-08-2020",
year = "2020",
doi = "10.4028/www.scientific.net/SSP.312.134",
language = "English",
isbn = "9783035737936",
series = "Solid State Phenomena",
publisher = "Trans Tech Publications Ltd",
pages = "134--139",
editor = "Galkin, {Nikolay Gennadievich}",
booktitle = "Physics and Technology of Nanostructured Materials V - Selected full text papers from the 5th Asian School-Conference on Physics and Technology of Nanostructured Materials, ASCO-Nanomat 2020",
}
RIS
TY - GEN
T1 - Crystallization of optically thick amorphous silicon films by near-ir femtosecond laser processing
AU - Mitsai, Eugeny
AU - Dostovalov, Alexander
AU - Bronnikov, Kirill
AU - Nepomniaschiy, Alexander
AU - Zhizhchenko, Alexey
AU - Kuchmizhak, Aleksandr
N1 - Funding Information:
This work was supported by the Russian Science Foundation (Grant no. 18-79-10091) and Russian Foundation for Basic Research (project no. 19-32-90235).
Publisher Copyright:
© 2020 Trans Tech Publications Ltd, Switzerland.
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020
Y1 - 2020
N2 - We demonstrated efficient crystallization of amorphous Si films induced by their direct irradiation with near-IR femtosecond laser pulses coming at sub-MHz repetition rate. Comprehensive analysis of morphology and composition of the laser-annealed film by atomic-force microscopy, Fourier-transform IR, Raman and energy dispersive X-ray spectroscopy as well as numerical modeling of optical spectra confirmed efficient crystallization of amorphous Si and high-quality of the obtained films opening pathway for applications in thin-film solar cells, transistors and displays.
AB - We demonstrated efficient crystallization of amorphous Si films induced by their direct irradiation with near-IR femtosecond laser pulses coming at sub-MHz repetition rate. Comprehensive analysis of morphology and composition of the laser-annealed film by atomic-force microscopy, Fourier-transform IR, Raman and energy dispersive X-ray spectroscopy as well as numerical modeling of optical spectra confirmed efficient crystallization of amorphous Si and high-quality of the obtained films opening pathway for applications in thin-film solar cells, transistors and displays.
KW - Amorphous silicon
KW - Femtosecond laser pulses
KW - FTIR spectroscopy
KW - Laser-induced annealing
KW - Polycrystalline silicon
KW - Raman spectroscopy
KW - Thin films
UR - http://www.scopus.com/inward/record.url?scp=85097597537&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/SSP.312.134
DO - 10.4028/www.scientific.net/SSP.312.134
M3 - Conference contribution
AN - SCOPUS:85097597537
SN - 9783035737936
T3 - Solid State Phenomena
SP - 134
EP - 139
BT - Physics and Technology of Nanostructured Materials V - Selected full text papers from the 5th Asian School-Conference on Physics and Technology of Nanostructured Materials, ASCO-Nanomat 2020
A2 - Galkin, Nikolay Gennadievich
PB - Trans Tech Publications Ltd
T2 - 5th Asian School-Conference on Physics and Technology of Nanostructured Materials, ASCO-Nanomat 2020
Y2 - 30 July 2020 through 3 August 2020
ER -
