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Correction of scanning steps to improve accuracy in interferometric profilometer. / Sysoev, E.; Kulikov, R.; Vykhristyuk, I. et al.

In: Measurement Science Review, Vol. 15, No. 1, 01.02.2015, p. 9-12.

Research output: Contribution to journal › Article › peer-review

Harvard

Sysoev, E, Kulikov, R, Vykhristyuk, I & Chugui, Y 2015, 'Correction of scanning steps to improve accuracy in interferometric profilometer', Measurement Science Review, vol. 15, no. 1, pp. 9-12. https://doi.org/10.1515/msr-2015-0002

APA

Sysoev, E., Kulikov, R., Vykhristyuk, I., & Chugui, Y. (2015). Correction of scanning steps to improve accuracy in interferometric profilometer. Measurement Science Review, 15(1), 9-12. https://doi.org/10.1515/msr-2015-0002

Vancouver

Sysoev E, Kulikov R, Vykhristyuk I, Chugui Y. Correction of scanning steps to improve accuracy in interferometric profilometer. Measurement Science Review. 2015 Feb 1;15(1):9-12. doi: 10.1515/msr-2015-0002

Author

Sysoev, E. ; Kulikov, R. ; Vykhristyuk, I. et al. / Correction of scanning steps to improve accuracy in interferometric profilometer. In: Measurement Science Review. 2015 ; Vol. 15, No. 1. pp. 9-12.

BibTeX

@article{f641b54f5ea94017934b004f6c5d8c61,
title = "Correction of scanning steps to improve accuracy in interferometric profilometer",
abstract = "In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.",
keywords = "measurement error, nanorelief measurement, Phase shifting interferometry",
author = "E. Sysoev and R. Kulikov and I. Vykhristyuk and Yu Chugui",
year = "2015",
month = feb,
day = "1",
doi = "10.1515/msr-2015-0002",
language = "English",
volume = "15",
pages = "9--12",
journal = "Measurement Science Review",
issn = "1335-8871",
publisher = "Slovak Academy of Sciences - Inst. Measurement Science",
number = "1",

}

RIS

TY - JOUR

T1 - Correction of scanning steps to improve accuracy in interferometric profilometer

AU - Sysoev, E.

AU - Kulikov, R.

AU - Vykhristyuk, I.

AU - Chugui, Yu

PY - 2015/2/1

Y1 - 2015/2/1

N2 - In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.

AB - In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.

KW - measurement error

KW - nanorelief measurement

KW - Phase shifting interferometry

UR - http://www.scopus.com/inward/record.url?scp=84925854808&partnerID=8YFLogxK

U2 - 10.1515/msr-2015-0002

DO - 10.1515/msr-2015-0002

M3 - Article

AN - SCOPUS:84925854808

VL - 15

SP - 9

EP - 12

JO - Measurement Science Review

JF - Measurement Science Review

SN - 1335-8871

IS - 1

ER -

ID: 25331804