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Atomic Force Microscopy Local Oxidation of GeO Thin Films

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.1134/S1063782618160030
Final published version

K. N. Astankova
A. S. Kozhukhov
E. B. Gorokhov
I. A. Azarov
A. V. Latyshev

Original language	English
Pages (from-to)	2081-2084
Number of pages	4
Journal	Semiconductors
Volume	52
Issue number	16
DOIs	https://doi.org/10.1134/S1063782618160030
Publication status	Published - 1 Dec 2018

Research areas

NANO-OXIDATION, HUMIDITY

OECD FOS+WOS

ID: 18626674