Research output: Contribution to journal › Article › peer-review
Application of RF discharge in oxygen to create highly oxidized metal layers. / Stadnichenko, A. I.; Kibis, L. S.; Svintsitskiy, D. A. et al.
In: Surface Engineering, Vol. 34, No. 1, 02.01.2018, p. 1-5.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Application of RF discharge in oxygen to create highly oxidized metal layers
AU - Stadnichenko, A. I.
AU - Kibis, L. S.
AU - Svintsitskiy, D. A.
AU - Koshcheev, S. V.
AU - Boronin, A. I.
PY - 2018/1/2
Y1 - 2018/1/2
N2 - The radio frequency (RF) discharge in an oxygen atmosphere was used to produce metal oxide films. The high efficiency of the RF discharge technique for metal oxidation at room temperature was demonstrated for gold, silver and copper foils. Oxide films up to 10 nm in thickness were obtained. The produced oxide films were studied by X-ray photoelectron spectroscopy (XPS). The XPS data showed the formation of oxidised species: Cu2+, Ag1+ and Au3+. Analysis of the oxygen species was performed using O1s spectra. For copper and silver foils, the formation of additional oxygen species apart from oxygen in the structure of oxides was shown. The reaction probability toward oxidation of carbon monoxide (CO) was estimated for all oxidised layers. It was established that gold and silver oxide films interacted with CO at room temperature, while cupric oxide showed high activity at temperature >353 K.
AB - The radio frequency (RF) discharge in an oxygen atmosphere was used to produce metal oxide films. The high efficiency of the RF discharge technique for metal oxidation at room temperature was demonstrated for gold, silver and copper foils. Oxide films up to 10 nm in thickness were obtained. The produced oxide films were studied by X-ray photoelectron spectroscopy (XPS). The XPS data showed the formation of oxidised species: Cu2+, Ag1+ and Au3+. Analysis of the oxygen species was performed using O1s spectra. For copper and silver foils, the formation of additional oxygen species apart from oxygen in the structure of oxides was shown. The reaction probability toward oxidation of carbon monoxide (CO) was estimated for all oxidised layers. It was established that gold and silver oxide films interacted with CO at room temperature, while cupric oxide showed high activity at temperature >353 K.
KW - CO oxidation
KW - cupric oxide
KW - Gold oxide
KW - RF plasma
KW - silver oxide
KW - XPS
UR - http://www.scopus.com/inward/record.url?scp=84978521866&partnerID=8YFLogxK
U2 - 10.1179/1743294415Y.0000000010
DO - 10.1179/1743294415Y.0000000010
M3 - Article
AN - SCOPUS:84978521866
VL - 34
SP - 1
EP - 5
JO - Surface Engineering
JF - Surface Engineering
SN - 0267-0844
IS - 1
ER -
ID: 12081286